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New - Ceramic Electro Static Chucks (CESC)

The very latest in ESC technology, offering fantastic performance and cost/benefit to users. Form/fit/function replacements in the OEM cathodes - easy to install. Longer lifetime, better WIW temperature uniformity, less particles. Read More >

Contact us today to enquire and see what the latest CESC technology can do for your Etch or HDPCVD application.

AMAT, LAM, SPTS, TEL


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