SYSCON compare built into PDS, empowers customers to improve procedures

Fabs have identical recipes and chambers spread across several tools. SENTRY allows users to check settings on a chamber have not been changed by comparing current settings against a stored reference file. The is called the SENTRY SYSCON COMPARE utility. 

PDS SENTRY software allows the user set a .ref file ("golden file") on a network computer, then download SYSCON.DAT files from systems in the fab for comparison.

PDS SENTRY generates a "diff" file to show any differences between files and to be spotted easily and addressed prior to processing. This can help avoid mis-processing and scrap.