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DI Resistivity Sensor
Semicon Service offers Rezsense* a high quality replacement DI sensor for the AMAT-0 and AMAT-1 heat exchanger system.
Why a new design?
The DI sensor is used to monitor the resistivity of the liquid flowing through the heat exchanger up to the process chambers. Since many of the process chambers, CVD and ETCH, use RF during processing the conductivity of the fluid needs to be kept low to insure no energy is lost through the cooling system. On many CVD chambers the shower head or gas box, which is RF hot, is cooled directly by the heat exchanger fluid. If the resistivity of the fluid gets too low the RF energy can be transferred through the cooling loop to ground. Since partial power is being transferred to ground, less power is being transferred to the plasma causing potential process problems. The new design ensures reliable operation by using materials and manufacturing techniques that can hold up to the heated DI and ethylene glycol mixture. This allows accurate monitoring of the DI canister lifetime.
Problems with the original design: (yours probably looks like this)
- Gold plating flakes off of screw heads, causing corrosion.
- Screw heads trap debris accelerating breakdown
- Ardel insulator breaks down from ethylene glycol and DI at high temperature
- Large parts BOM for single sensor
- Overly complicated design leads to the above mentioned failures
- Deterioration requires annual replacement
Key Benefits of the new sensor
- Drop in replacement
- Fewer total parts used to manufacture
- Solid gold terminals (no plating to flake off and corrode)
- Potting material is rated at 300 degrees celcius. The product is non corrosive, non conductive and suitable for extreme temperature fluctuations
- No o-rings
- Life Time Warranty!
If you have a part that is in need of regular replacement give us a call, we may be able to come up with a solution for you!
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