New ESC designs, improved materials
- Each ESC designed to fit the standard OEM cathode - AMAT, Lam , SPTS, TEL.
- Coulombic design for reliable chucking and dechucking, no sticking like JR type.
- "Single-piece" design with no glue+plate, means much better lifetime and re-cycle/re-use
- Improved process performance, less particles, uniform cooling to wafer edge
Contact us for more information about each ESC and your etch chamber.