RTP Xe Process Kits
SSSco provides replacement process kit parts for AMAT Centura RTP XE and XE+ systems.
Direct replacements available for the following original part numbers:
| Description | OEM # | SSS Co # |
|---|---|---|
|
RTP XE/XE+ Edge Ring |
ACAA-36118 |
|
|
RTP XE/XE+ Support Cylinder |
ACAA-00289 |
|
|
2mm Window |
ACAA-35145 |
|
|
4mm Window |
ACAA-35265 |
|
|
ATM Window |
ACAA-35222 |
For more information or to request a quote on any or our products please contact us.