SSSco delivers fully remanuactured and as-is equipment, parts and retrofits for AMAT® Centura™ EPI. SSSco has refurbished and installed EPI systems at leading EPI wafer manufacturers as well as end user factories world wide.
Centura 5200 Parts
SSSco in-house design process and custom manufacturing of parts is geared to ensure that our unique parts and modules are delivered to precisely match quality and process requirements. Here are some SSSco custom Applied Materials Centura parts.
- Chamber Retrofit
- HTF Dual Seal Pumps
- HTF Gate Valve and Ball Valve
- HTF Lamp Module Reflectors
- HTF Lamps
- HTF Rotation Assembly
- HTF SCR Drivers
- RTP Xe Process Kits
- RTP Xe SCR Drivers and Fuses
- Replacement Blower
- Replacement Circuit Boards
EPI Upgrades & Retrofits
Our broad portfolio is designed to give you better performance and extended lifetime reliability via three key factors:
- Easy Drop-in replacement capability
- Engineered for improvement by industry experts
- Manufactured to customer requirements
SSSco has a global network to ensure that product support matches customer needs. We partner with qualified suppliers to deliver our products and support customers around the world.
- Centura 5200 DC Power Supply Repair
- Customer Support Services
- Gas line orbital welding service
- Heat Exchanger and Chiller Remanufacture
- MKS Astron refurbishment and repair 1 Year Warranty - Onshore in USA
- PCB Repair Service
- RTP Xe Temperature Probe Refurbishment
Looking for Available Equipment?
SSSco delivers remanufactured Applied Materials Endura 5500 PVD, Centura 5200 CVD, HDPCVD, RTP, EPI, DPS Etch, Producer and P5000 systems and chambers. Each system and chamber go through our unique and highly detailed 5S remanufacturing process to ensure consistent quality and reliability.See all available equipment