Support

SSS Co's highly experienced staff can provide scheduled contract maintenance as well as emergency support for most AMAT systems. SSS Co's engineers are some of the most respected and talented in the industry and can quickly diagnose and repair you system anywhere in the world. 

 

 

Process Services Available

Etch

•    Metal

•    Nitride

•    Oxide

•    Polysilicon

•    Single Crystal Silicon (Trench)

•    Tungsten

•    Tungsten Silicide

Metal Chemical Vapor Deposition

•    Tungsten

•    Tungsten Silicide

•    Titanium Nitride

Dielectric CVD

•    PETEOS

•    Thermal TEOS

•    Sub Atmospheric TEOS

•    Dual Frequency TEOS

•    Boron and/ or Phosphorus Doped TEOS

•    Fluorine Doped TEOS

•    Silane Nitride

•    Silicon Oxy-nitride

•    Dielectric Anti-Reflective Coating

•    Silane Boron and/ or Phosphorus doped Silicate Glass

•    Low K Dielectrics

•    High Density Plasma CVD

•    Advanced Insitu-chamber Clean

Rapid Thermal Processes

•    Polysilicon

•    Epitaxial Silicon

•    Nitride

•    RTP Implant Activation

Physical Vapor Deposition

•    Aluminum

•    Titanium Nitride

•    Titanium

•    Titanium Tungsten

•    Hot Aluminum

•    Cobalt Titanium

•    Pre Clean I

•    Pre Clean II

•    Copper Seed

•    Collimated Processes

 

Hardware Experience Available

 

APPLIED MATERIALS®

•    8130

•    8110

•    8310

•    8330

•    Etch Mk II

•    Etch MXP®

•    Etch MXP+™

•    Etch eMxP+®

•    Etch RPS

•    DxL

•    DxZ®

•    PRODUCER®

•    HDPCVD

•    WxL

•    WXZ™

•    WEB

•    WSiX

•    Aluminum PVD

•    Ti/TiN PVD

•    TiW PVD

•    Collimated PVD

•    PC I&II

•    HTF Poly

•    HTF Atmospheric EPI

•    HTF Reduced Pressure EPI

•    SEM Hardware and Applications

•    EXCITE™ Hardware and Applications

Mainframes

•    5000 All Variants

•    5200 All Variants

•    5300 Etch HDP

•    5500 All Variants

•    Producer®

Analytical Skills

•    SEM

•    SIMS

•    ECX

•    TXRF

•    FTIR

•    XPS/ESCA

•    Various Film Thickness Analyzers

•    Design of Experiments

 

 

 

Please contact SSS Co for further information.