On Site Support

SSSco highly experienced staff can provide scheduled contract maintenance as well as emergency support for AMAT systems. SSSco engineers are highly trained and experienced.

Process Services Available

Etch

•    Metal

•    Nitride

•    Oxide

•    Polysilicon

•    Single Crystal Silicon (Trench)

•    Tungsten

•    Tungsten Silicide

Metal Chemical Vapor Deposition

•    Tungsten

•    Tungsten Silicide

•    Titanium Nitride

Dielectric CVD

•    PETEOS

•    Thermal TEOS

•    Sub Atmospheric TEOS

•    Dual Frequency TEOS

•    Boron and/ or Phosphorus Doped TEOS

•    Fluorine Doped TEOS

•    Silane Nitride

•    Silicon Oxy-nitride

•    Dielectric Anti-Reflective Coating

•    Silane Boron and/ or Phosphorus doped Silicate Glass

•    Low K Dielectrics

•    High Density Plasma CVD

•    Advanced Insitu-chamber Clean

Rapid Thermal Processes

•    Polysilicon

•    Epitaxial Silicon

•    Nitride

•    RTP Implant Activation

Physical Vapor Deposition

•    Aluminum

•    Titanium Nitride

•    Titanium

•    Titanium Tungsten

•    Hot Aluminum

•    Cobalt Titanium

•    Pre Clean I

•    Pre Clean II

•    Copper Seed

•    Collimated Processes

 

Hardware Experience Available

 

APPLIED MATERIALS®

•    8130

•    8110

•    8310

•    8330

•    Etch Mk II

•    Etch MXP®

•    Etch MXP+™

•    Etch eMxP+®

•    Etch RPS

•    DxL

•    DxZ®

•    PRODUCER®

•    HDPCVD

•    WxL

•    WXZ™

•    WEB

•    WSiX

•    Aluminum PVD

•    Ti/TiN PVD

•    TiW PVD

•    Collimated PVD

•    PC I&II

•    HTF Poly

•    HTF Atmospheric EPI

•    HTF Reduced Pressure EPI

•    SEM Hardware and Applications

•    EXCITE™ Hardware and Applications

Mainframes

•    5000 All Variants

•    5200 All Variants

•    5300 Etch HDP

•    5500 All Variants

•    Producer®

Analytical Skills

•    SEM

•    SIMS

•    ECX

•    TXRF

•    FTIR

•    XPS/ESCA

•    Various Film Thickness Analyzers

•    Design of Experiments

 

 

 

Please contact SSS Co for further information.