Ceramic ESC AMAT for DPS Metal and Poly Etch Chambers
The latest CESC technology for AMAT DPS Metal Etch and Poly Etch chambers. The SSSco CESC fits onto OEM polyimide cathode with no change necessary. The improved design and better material means better process performance and lifetime. Particles are reduced as no sticking or breakdown of polyimide, microarcing is eliminated. Better temperature and etch uniformity. Longer lifetime and reduced cost of ownership. Enquire
Replaces all 200mm and 150mm Polyimide ESC parts including 0090-35133, 0040-77771,0020-39087, 0041-33300, 0040-35869.