Refurbished Equipment
Semiconductor Support Services refurbishes previously used Applied Materials® Endura™ 5500 PVD, Centura™ 5200 CVD, HDPCVD, RTP, EPI, DPS™ Etch and P5000 systems. Each system goes through our unique and highly detailed refurbishment process ensuring consistent quality and dependability.
- Complete teardown of core system
- All parts, components and subsystems are inspected, cleaned, calibrated and replaced when necessary
- Monolith is chemically cleaned and refinished
- Pneumatic, water, vacuum and electrical lines refurbished and tested
- Monolith is reinstalled and mainframe tested for vacuum, cooling system and pneumatic integrity
- System controller is inspected, tested and refurbished as needed
- Circuit boards, cables, power supplies, circuit breakers tested and refurbished as needed
- Chambers fully cleaned using industry-qualified chemical cleaning
- Pumping and vacuum subsystems refurbished as necessary by OEM
- Manometers sent to MKS® for calibration or repair
- Ion and TC gauges inspected and refurbished or replaced
- All Robotics components refurbished
- 2 weeks is spent on a rigorous final test assuring a rapid qualification at customer sites
For more information contact sales@semiconservice.com
Available Items:
SSS ID |
Category |
Manufacturer |
Model |
Description |
|
Centura™ II 5200 |
eMAX® CT+ Oxide Etch | |||
|
Centura™ II 5200 |
eMAX® CT+ Oxide Etch | |||
| C1031 | AMAT |
Centura™ I 5200 |
HDPCVD Ultima |
|
| C1110 | AMAT |
Centrua™ I 5200 | DPS+® Poly Etch | |
| E7047 | AMAT |
Endura™ 5500 | PVD | |
| P1248 |
AMAT |
Producer® SE 300 | Producer® 300mm PECVD | |
| P1251 | Semiconductor | AMAT | Producer® SE | Producer® 200mm Bridge |
| P1256 | AMAT |
Producer® SE | SaCVD® / PE TEOS | |
| R1093-A | AMAT |
Endura™ 5500 | PVD | |
| R1093-B | KLA-Tencor | Surfscan® 6220 | Defect Inspection Station | |
| R1093-C | KLA-Tencor |
RS35C | Resistivity Mapping | |
| R1093-D | KLA-Tencor |
Prometrix® UV-1050 | Film Thicknes Mapping | |
| B1001 | EVG® | 101 Coater | Advanced Resist Processing | |
| B1002 | LPE | 2061 EPI | Small Batch Epitaxial Reactor | |
| B1003 | KLA-Tencor |
Surfscan® 6200 | Defect Inspection Station | |
| B1004 | SCHMID™ | LIP Plater | Light Induced Plater | |
| B1005 | SEMITOOL | Raider® |
Manual Porous Tool | |
| B1006 | SUSS | Coater | MicroTec Delta Coater | |
| B1008 | FEI | Phenom™ |
Scanning Electron Microscope | |
| B1010 | EEJA | Plater | Cup Plater | |
| B1011 | EEJA |
Plater | Cup Plater | |
| B1012 | Despatch | CF Series | In-Line Diffusion Furnace | |
| B1013 | Despatch |
DF 14414 | In-Line Diffusion Furnace | |
| B1014 | Alcatel | AMS 200IP | Deep RIE Etcher | |
| B1015 | SUSS |
Delta™ 12AQ | Develop, Etch, Clean system | |
| B1016 | AMAT |
Endura™ 5500 | PVD Al, Ni, SiN, Preclean II | |
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