Demo Lab |
SSS Co Foundry / Demo Lab Capabilities
Class 10 foundry for custom manufacturing and advanced R&D applications
Current equipment set:
Industry standard Endura® 5500 cluster tools used for thin-film PVD deposition.
Configurable between 100, 125, 150 and 200mm wafer sizes
Can accommodate glass, sapphire and other non-standard substrates
In-house metrology capability including:
RS-35 (sheet resistance)
UV-1050 (thin-film thickness measurement)
Tencor 6220 (particle inspection tool)