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Authorized SMC Chiller Repairs at SSSco

New service for SMC chiller repair


Harmonic Arm Drive Repair

For Lam standalone etch tools, such as Rainbow


New PCB’s for AMAT Systems

Replacement for obsolete and difficult to find boards

Categories: Parts, General


100mm Ceramic ESC available

For AMAT etch chambers, MxP Oxide or Poly


PDS - now available for AMAT Producer

The Penulator™ Data System (PDS) is now available for all AMAT Producer systems

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