Ceramic ESC EXELAN, 4520

The latest CESC technology for Lam standalone and cluster tools. Improved design means no assembly on site for cooling jacket, and improved temperature control at the wafer edge. Additionally, the single peice Coulombic design means no dechucking metal pins required. Enquire

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Equivalent parts for ESC part numbers 839-440462-508, 839-440462-108, 718-094756-081, 718-094523-281, 718-043893-801, 718-094756-061, 718-094523-261