Narrow Body Load Lock Wafer Slide Detect Kit

This product installs wafer slide detection capability on Centura or Endura system with Narrow Body Load Locks.  One kit covers both LLA and LLB.

This prevents wafers from being dropped or misplaced on blades, leading to brokage.


SSSco installs the kit at customer site. 

ACEA-S0073 (Centura) & ACEA-S0011 (Endura),  replaces AMAT Part Numbers:

0242-08907  Kit, Wafer Slide, LLA

0242- 08908 Kit, Wafer Slide, LLB


0242-76577  Kit, Wafer Slide, LLA

0242-76734  Kit, Wafer Slide, LLB

To find out more, please contact us.