Narrow Body Load Lock Wafer Slide Detect Kit
This product installs wafer slide detection capability on Centura or Endura system with Narrow Body Load Locks. One kit covers both LLA and LLB.
This prevents wafers from being dropped or misplaced on blades, leading to brokage.
SSSco installs the kit at customer site.
ACEA-S0073 (Centura) & ACEA-S0011 (Endura), replaces AMAT Part Numbers:
0242-08907 Kit, Wafer Slide, LLA
0242- 08908 Kit, Wafer Slide, LLB
0242-76577 Kit, Wafer Slide, LLA
0242-76734 Kit, Wafer Slide, LLB
To find out more, please contact us.