TGV Throttling Gate Valve Upgrade for DPS Poly

This upgrade is available for DPS Poly etch chambers on AMAT Centura platforms, and replaces the older Standard Gate valve and the NSK Throttle Valve.

Benefits include;

  • Reduced maintenance costs, reduced parts, saved time on rebuilds
  • Removal of plunger means lower particles
  • Reliable pressure control with turbo isolation
  • Faster servo to pressure setpoint

SSSco supplies a complete kit, and can offer installation at customer site if required.