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DPS Metal Etch, New Chamber Body
DPS Metal Etch chambers are very popular at 200mm and 150mm, for many years and many applications. The original AMAT chamber body part number 0040-02544 can now be replaced with a new equivalent chamber body. After many years of production, chamber bodies can become difficult to maintain, and start to…
HDP-CVD Ultima+ Chiller Upgrade, replace 0190-00404
New SMC Chiller with Centura integration. Replace obsolete Chiller with new efficient upgrade.
DPS Metal Etch - new Chamber Body
New chamber body replaces older leaking chambers
2021. Happy New Year from SSSco
seasons greetings from the SSSco team
HDPCVD Centura Ultima+ Chiller Upgrade
The latest specification chiller for Ultima+ Centura is the INR-498-011D. SSSco supplies a new chiller with Centura Integration. Replaces 0190-00404, 0190-08874, 0190-07528, 0190-01684. Increases; Reliability + Uptime Decreases; Downtime + Repair Costs SSSco supplies a replacement solution including new Centura control cable, and 1 year warranty with an optional 2nd…
EPC Remote - New Etch Endpoint Computer
Customers can now buy a new endpoint computer (EPC) from SSSco for use with Centura or P5000 etch systems. 1 Year warranty. EPC Remote saves valuable time for engineers, delivers much more reliable performance. Includes new SBC, solid state drive, new PSU. Valuable new capability is added, the EPC can…
New Etch Endpoint Computer - Remote Browser - EPC Remote
AMAT Etch Endpoint Computer
SMC Chillers
SSSco is an authorised repair center for SMC chillers. We offer high quality remanufacturing, repair and upgrades of all current models of SMC chillers.
New SMC Chillers in stock
SSSco holds stock of new SMC chillers
AMAT XR Implanter Support - high quality parts
New parts are now available for AMAT XR Series implanters
Implanter - General Parts
P/No AMAT P/N IMPLANTER GENERAL PARTS Description Area Source XR Implanter models DKT-001 n/a 9500-XR120 exhaust duct, dry pump, S shape for 9500/9500xR vacuum system OPM PI9500-xR DKT-002 n/a 9500-XR120 exhaust duct, dry pump, straight for xR80, xR120, ｘR vacuum system OPM xR80,Leap,120 DKT-004 n/a 9500-XR120 exhaust duct, dry pump,…
Implanter Wafer Loader Parts
P/No AMAT P/N WAFER LOADER PARTS Description Area Source XR Implanter models ARM-001 0040-95199 Hollow Gripper, Y-arm, 200mm Waferloader OPM PI9500-ｘR BRG-004 3060-00229 guide bearing, blade box assy Waferloader OPM PI9500-xR120 BRG-005 3060-00230 drive bearing, blade box Waferloader OPM PI9500-xR120 BRG-006 3060-00231 guide bearing, Cassette Indexer Waferloader OPM PI9500-xR120 BRG-007…
PDS SENTRY Software - New Release V3.0
V3.000 Release of SENTRY software available for download
Implanter Scan Arm Parts
P/No AMAT P/N SCAN ARM PARTS Description Area Source XR Implanter models BRG-001 3500-90027 lock nut, Scan Drive shaft ball screw, upper Scan Arm OPM PI9500-xR120 BRG-002 3060-90075 bearing, Scan Drive shaft ball screw, upper Scan Arm OPM PI9500-xR120 BRG-003 3060-90076 bearing, Scan Drive shaft ball screw, lower Scan Arm…
Implanter Beamline Parts
P/No AMAT P/N BEAMLINE PARTS Description Area Source - OPM, 2nd source, or Custom XR Implanter models GRP-001 n/a AMAT Implanter9500-XR120 Graphite Inner, flight tube, all models (specify on order) Beamline Custom ALL GRP-002 n/a AMAT Implanter9500-XR120 Graphite Outer, flight tube, all models (specify on order) Beamline Custom ALL MTR-003…
DPS Etch Chambers - DTCU Refurbishment
DPS Poly Chamber repairs and refurbishment for the DTCU
DPS Chamber, Refurbishment of DTCU
SSSco refurbishes and repairs the Dome Temperature Control Unit (DTCU) for DPS Poly etch chambers. The DTCU is a critical complex system which may be obsolete, and in most cases is over 15 years old. SSSco uses qualified materials and quality assurance procedures to make sure each DTCU is functioning…
Remote Working - PDS Remote enables AMAT Users
PDS Remote enables screen sharing if the AMAT systems
Open For Business - Globally
SSSco has maintained operations from Austin
New equipment for sale - CMP and PVD
AMAT 200mm, Mirra Mesa CMP system and Endura PVD system