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Refurbished Equipment
Semiconductor Support Services finds and refurbishes previously used PVD, CVD and Etch semiconductor tools. Each core goes through our unique refurbishment process and is documented with a detailed Gantt Chart of completion dates. Each system goes thru:
- Detailed teardown
- Repair or Replacement of sub-components
- Refurbishment and Recalibration, including updated manufacturer warranties, of key mechanicsm, including but not limited to: CryoPumps, RF Power Supplies, RF Matches, MFCs, Transducers, Throttle Valves, & Turbo Pumps
- Professional cleaning and/or coating of metal parts
- System assembly
- Testing
- Source inspection
- Shipment
- Installation and Start Up
Our product selection is ever-changing as we scour the world for systems to purchase and refurbish to your design specification. The current mainframes available for your custom design requirements include:
Items Available
 | Endura 5500
200MM,
Narrow Body Load Locks,
A Passthru,
B Cool Down,
C Widebody Alps Cobalt SLT-ESC,
D Widebody AlCu MCA E-Chuck,
1 Wide Body AL HT ESC,
2 Std. Body TI 101,
3 Wide Body AL HT-ESC,
4 Wide Body AL,
Status: Available | |  | Endura 5500
200 MM Narrow Body Load Locks, CH A and CH B Cooldown, CH C Preclean, CH D Blank, CH E/F Orienter Degas, CH 1 TI, CH 2 TIN, CH 3 ALCU, CH 4 TIN Status: Available | | | | | | | |  | Endura 5500
200 MM,
Narrow Body Load Locks,
CH A Cooldown,
CH B Cooldown,
CH C Preclean,
CH D Blank,
CH E/F Orienter Degas,
CH 1 TI,
CH 2 TIN,
CH 3 ALCU,
CH 4 TIN,
Status: Available | |  | HTHU PVD Chamber
Hot Aluminum
HT MCA+ESC
200 MM
Fully refurbished
QTY 2 Status: Available | | | | | | | |  | Applied Materials Endura PVD
150 MM,
SN 3163,
Narrow Body Load Locks,
CH A Cooldown,
CH B Cooldown,
CH C Preclean,
CH D Blank,
CH E/F Orienter Degas,
CH 1 TI,
CH 2 TIN,
CH 3 ALCU,
CH 4 TIN, Status: Available September 2010 | |  | Applied Materials Endura PVD
150 MM,
SN 3362,
Narrow Body Load Locks,
CH A Cooldown,
CH B Cooldown,
CH C Preclean,
CH D Blank,
CH E/F Orienter Degas,
CH 1 TI,
CH 2 TIN,
CH 3 ALCU,
CH 4 TIN, Status: Available September 2010 | | | | | | | |  | Endura 5500 TxZ
200 MM Narrow Body Load Locks CH A Cooldown CH B PT CH C Preclean CH D Preclaan CH E/F Orienter Degas CH 1 IMP TI CH 2 TxZ CH 3 TxZ CH 4 IMP TI
Status: Available September 2010 | |  | Centura EMAX CT+ Oxide Etch
Centura EMAX CT+ Oxide Etch
200MM
SN 408206 Vintage 2007
Offline Q1 2010 Currently Warehoused
Centura 2 frame
VME2 Gaspanel VHP+ Robot
Widebody Loadlocks
Chambers A, B, C EMAX CT+ Oxide Etch
Installation Available
Status: Available, Warehoused | | | | | | | |  | Centura DPS+ Poly Etch
AMAT Centura 200MM DPS+ Poly Etch
SN 406476
Vintage 2004
Offline Q1 2010
Currently Warehoused
Centura 2 frame
VME2 Gaspanel
VHP+ Robot
Narrow Body Tilt Out Loadlocks with wafer slide detect
Chambers A, B, C DPS+ Poly Etch
Vat Throttling Gate Valves
BOC Edwards Turbo Pumps
Chamber F Orienter Status: Available, warehoused | |  | Centura EMAX CT+ Oxide Etch
Centura EMAX CT+ Oxide Etch
200MM
SN 408143 Vintage 2007
Offline Q1 2010 Currently Warehoused
Centura 2 frame
VME2 Gaspanel VHP+ Robot
Widebody Loadlocks
Chambers A, B, C EMAX CT+ Oxide Etch
Installation Available
Status: Available, Warehoused | | | | | | | |  | Applied Materials Centura EPI HTF
AMAT Centura EPI HTF,
Serial Number H206,
3 Chambers,
Reduced Pressure or Atmospheric configuration possible,
Accuset 2 Dopant control system,
Nickel Plated Narrow Body tilt out loadlocks,
Nickel Plated Widebody Loadlocks with auto rotate available,
Variable Speed Blowers,
480V
Status: Currently being refurbished, available Q4 2010 | |
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