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Refurbished Equipment

Semiconductor Support Services finds and refurbishes previously used PVD, CVD and Etch semiconductor tools.  Each core goes through our unique refurbishment process and is documented with a detailed Gantt Chart of completion dates.  Each system goes thru:

  • Detailed teardown
  • Repair or Replacement of sub-components
  • Refurbishment and Recalibration, including updated manufacturer warranties, of key mechanicsm, including but not limited to: CryoPumps, RF Power Supplies, RF Matches, MFCs, Transducers, Throttle Valves, & Turbo Pumps
  • Professional cleaning and/or coating of metal parts
  • System assembly
  • Testing
  • Source inspection
  • Shipment
  • Installation and Start Up

Our product selection is ever-changing as we scour the world for systems to purchase and refurbish to your design specification.  The current mainframes available for your custom design requirements include:

Items Available

Endura 5500
200MM, Narrow Body Load Locks, A Passthru, B Cool Down, C Widebody Alps Cobalt SLT-ESC, D Widebody AlCu MCA E-Chuck, 1 Wide Body AL HT ESC, 2 Std. Body TI 101, 3 Wide Body AL HT-ESC, 4 Wide Body AL,

Status: Available

 

Endura 5500
200 MM Narrow Body Load Locks, CH A and CH B Cooldown, CH C Preclean, CH D Blank, CH E/F Orienter Degas, CH 1 TI, CH 2 TIN, CH 3 ALCU, CH 4 TIN

Status: Available

 
         

Endura 5500
200 MM, Narrow Body Load Locks, CH A Cooldown, CH B Cooldown, CH C Preclean, CH D Blank, CH E/F Orienter Degas, CH 1 TI, CH 2 TIN, CH 3 ALCU, CH 4 TIN,

Status: Available

 

HTHU PVD Chamber
Hot Aluminum HT MCA+ESC 200 MM Fully refurbished QTY 2

Status: Available

 
         

Applied Materials Endura PVD
150 MM, SN 3163, Narrow Body Load Locks, CH A Cooldown, CH B Cooldown, CH C Preclean, CH D Blank, CH E/F Orienter Degas, CH 1 TI, CH 2 TIN, CH 3 ALCU, CH 4 TIN,

Status: Available September 2010

 

Applied Materials Endura PVD
150 MM, SN 3362, Narrow Body Load Locks, CH A Cooldown, CH B Cooldown, CH C Preclean, CH D Blank, CH E/F Orienter Degas, CH 1 TI, CH 2 TIN, CH 3 ALCU, CH 4 TIN,

Status: Available September 2010

 
         

Endura 5500 TxZ
200 MM Narrow Body Load Locks CH A Cooldown CH B PT CH C Preclean CH D Preclaan CH E/F Orienter Degas CH 1 IMP TI CH 2 TxZ CH 3 TxZ CH 4 IMP TI

Status: Available September 2010

 

Centura EMAX CT+ Oxide Etch
Centura EMAX CT+ Oxide Etch 200MM SN 408206 Vintage 2007 Offline Q1 2010 Currently Warehoused Centura 2 frame VME2 Gaspanel VHP+ Robot Widebody Loadlocks Chambers A, B, C EMAX CT+ Oxide Etch Installation Available

Status: Available, Warehoused

 
         

Centura DPS+ Poly Etch
AMAT Centura 200MM DPS+ Poly Etch SN 406476 Vintage 2004 Offline Q1 2010 Currently Warehoused Centura 2 frame VME2 Gaspanel VHP+ Robot Narrow Body Tilt Out Loadlocks with wafer slide detect Chambers A, B, C DPS+ Poly Etch Vat Throttling Gate Valves BOC Edwards Turbo Pumps Chamber F Orienter

Status: Available, warehoused

 

Centura EMAX CT+ Oxide Etch
Centura EMAX CT+ Oxide Etch 200MM SN 408143 Vintage 2007 Offline Q1 2010 Currently Warehoused Centura 2 frame VME2 Gaspanel VHP+ Robot Widebody Loadlocks Chambers A, B, C EMAX CT+ Oxide Etch Installation Available

Status: Available, Warehoused

 
         

Applied Materials Centura EPI HTF
AMAT Centura EPI HTF, Serial Number H206, 3 Chambers, Reduced Pressure or Atmospheric configuration possible, Accuset 2 Dopant control system, Nickel Plated Narrow Body tilt out loadlocks, Nickel Plated Widebody Loadlocks with auto rotate available, Variable Speed Blowers, 480V

Status: Currently being refurbished, available Q4 2010