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Refurbished Equipment
Semiconductor Support Services finds and refurbishes previously used PVD, CVD and Etch semiconductor tools. Each core goes through our unique refurbishment process and is documented with a detailed Gantt Chart of completion dates. Each system goes thru:
- Detailed teardown
- Repair or Replacement of sub-components
- Refurbishment and Recalibration, including updated manufacturer warranties, of key mechanicsm, including but not limited to: CryoPumps, RF Power Supplies, RF Matches, MFCs, Transducers, Throttle Valves, & Turbo Pumps
- Professional cleaning and/or coating of metal parts
- System assembly
- Testing
- Source inspection
- Shipment
- Installation and Start Up
Our product selection is ever-changing as we scour the world for systems to purchase and refurbish to your design specification. The current mainframes available for your custom design requirements include:
Items Available
 | Endura 5500
200MM
Narrow Body Load Locks
A Passthru
B Cool Down
C Widebody Alps Cobalt SLT-ESC
D Widebody AlCu MCA E-Chuck
1 Wide Body AL HT ESC
2 Std. Body TI 101
3 Wide Body AL HT-ESC
4 Wide Body AL
Status: Available | |  | WxZ Chamber
200MM WxZ
Chamber on stand
QTY 2 Status: Available | | | | | | | |  | Endura 5500
200 MM Narrow Body Load Locks CH A Cooldown CH B Cooldown CH C Preclean CH D Blank CH E/F Orienter Degas CH 1 TI CH 2 TIN CH 3 ALCU CH 4 TIN Status: Available | |  | Endura 5500
200 MM
Narrow Body Load Locks
CH A Cooldown
CH B Cooldown
CH C Preclean
CH D Blank
CH E/F Orienter Degas
CH 1 TI
CH 2 TIN
CH 3 ALCU
CH 4 TIN
Status: Available | | | | | | | |  | HTHU PVD Chamber
Hot Aluminum
HT MCA+ESC
200 MM
Fully refurbished
QTY 2 Status: Available | |  | Endura 5500 TxZ
200 MM Narrow Body Load Locks CH A Cooldown CH B PT CH C Preclean CH D Preclaan CH E/F Orienter Degas CH 1 IMP TI CH 2 TxZ CH 3 TxZ CH 4 IMP TI
Status: Available | | | | | | | |  | TANOX Chamber
Tantalum pentoxide
removed from 5200 HTF system
Daihan Microwave System
Status: Available | |
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