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Parts & Equipment
- Platform Parts
- DPS Metal Etch, New Chamber Body
- Implanter - General Parts
- Implanter Wafer Loader Parts
- Implanter Scan Arm Parts
- Implanter Beamline Parts
- EPI Lamp Module Repair Service
- PDS Drive - replaces floppy U2, adds U4
- PVD shutter parts
- Wide Body PVD Chamber Shell
- RTP Xe SCR Drivers and Fuses
- RTP Xe Temperature Probe Refurbishment
- Chamber Retrofit
- Bake out Lamps
- PVD Chamber Interconnect Boards
- RTP Xe Process Kits
- HTF Dual Seal Pumps
- HTF Rotation Assembly
- HTF Gate Valve and Ball Valve
- HTF Lamp Module Reflectors
- HTF Lamps
- Pyrometer
- Replacement Blower
- HPD-CVD Ultima Plus 3 piece lid
- Upgrades & Retrofits
- New Robot Drivers
- AMAT 0, AMAT 1, Upgrade to new SMC
- HDPCVD Centura Ultima+ Chiller Upgrade
- EPC Remote - New Etch Endpoint Computer
- DPS Chamber, Refurbishment of DTCU
- Repairs - Scope of Work
- TGV Throttling Gate Valve Upgrade for DPS Poly
- New V452 Single Board Computer SBC PCB’s
- LoFAT Sled Upgrade and Remanufacture
- Paragon RPS Upgrade Kits
- Ultima+ Chamber upgrades
- Ceramic ESC TEL 8500
- Ceramic ESC AMAT Ultima and Ultima+
- Ceramic ESC AMAT DPS+ Metal Etch and Poly Etch
- Ceramic ESC AMAT for DPS Metal and Poly Etch Chambers
- PDS Remote
- Penulator SSD - Solid State Drive, U0
- Ceramic ESC AMAT for Tungsten Etchback MkII and WEB
- Ceramic ESC AMAT MxP chambers, all types
- Ceramic ESC Super-e chamber
- Improved ESC Lam TCP chambers
- Ceramic ESC Lam 4520, 4520XL, EXCELAN
- Improved ESC’s - AMAT, Lam, TEL, SPTS chambers
- Water Manifold PLUS for HDP ULTIMA and ULTIMA+
- CVG+ - Constant Voltage Gradient upgrade
- Upgrade existing Endpoint Computer (EPC) - Centura and P5000
- PDS Penulator Data System
- Penulator™ Upgrades
- PDS Sentry software
- ENI RF Rack - replaces ETO rack
- RPS Lid Upgrades, from RF or microwave clean to NF3 remote plasma
- DI Resistivity Sensor
- HTF SCR Drivers
- Demo of PDS, Pro monitors and safe efficient monitor switching
- Penulator Pro Monitor
- Services
- SMC Chiller Repair and Refurbishment
- Lam Etch - ENI RF Match Repair
- Harmonic Arm Drive refurbishment
- Gate Drive Assembly Refurbishment
- AMAT RF Match Refurbishment
- Lam Mini-Match Refurbishment
- DSQ RF Match Refurbishment
- T-Match Refurbishment
- TCP 9600 Match Refurbishment
- DPS Poly Throttle Valve Rebuild 0010-39645
- HP, HP+, VHP Robot Driver Rebuild and Repair
- Novellus C1 Robot Remanufacturing
- Heat Exchanger and Chiller Remanufacture - 1 Year Warranty
- Gate Valve Refurbishment
- Slit Valve Refurbishment
- PCB Repair Service
- Neslab Steelhead Heat Exchanger Remanufacturing
- Ion Gauge Power Supply Repair
- Endura, Centura 15V DC Power Supply Repair
- Endura 5500 PVD 24V DC Power Supply Repair
- Gas line orbital welding service
- Replacement AMAT PCB Circuit Boards
- Customer Support Services
- RPS Astron CIP - Refurbishment and Repair
- Orienter Chamber Laser Refurbishment
- Monochromator Refurbishment
- AMAT0, AMAT1 Heat Exchanger Remanufacturing
- Neslab III Heat Exchanger Remanufacturing
- PVD Magnet Repair
- Platform Parts
- Company
- Support
- Blog