Centura HDPCVD
ALL ENQUIRIES TO equipment@semiconservice.com
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Mainframe Type: |
Centura Phase II OTF, Fast Wafer Mapping |
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Chamber Position/Type: |
A: Ultima TE, RPS Astron-I, ENI RF Rack |
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B: Ultima TE, RPS Astron-I, ENI RF Rack |
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C; Blank |
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D; Blank |
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E; Multislot Cooldown |
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F; Orienter |
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Loadlocks |
Narrow Body |
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Year |
1999 |
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Wafer Size |
200mm |
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Robot |
HP+ |
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Chiller |
SMC INR-498-0018 |
