Centura HDPCVD C848

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Mainframe Type:

Centura Phase II

OTF, Fast Wafer Mapping

Chamber Position/Type:

A: Ultima TE, RPS Astron-I, ENI RF Rack

B: Ultima TE, RPS Astron-I, ENI RF Rack

C; Blank

D; Blank

E; Multislot Cooldown

F; Orienter

Loadlocks

Narrow Body

Serial Number

C848 1999

Wafer Size 

200mm

Robot

HP+

Chiller

SMC INR-498-0018

 

   

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