SSSco Upgrade Center

SSSco delivers high value upgrades which improve performance, manage obsolescence, extend lifetime;

Penulator™ Products - remote access, file management, monitors, media updates

 RPS Upgrades    -  Remote NF3 plasma clean lid upgrades for HDP, PECVD, SACVD, WCVD

 Ceramic ESC   -  Improved design, materials.  AMAT, Lam, TEL

 HDP   Ultima+   -  ENI RF racks, 3L or 8L RPS, ceramic ESC

- Narrow Body Load Lock Wafer Slide Detector Kit