Upgrades and Retrofits

Media Upgrades  - Penulator products - monitor, floppy, data transfer, remote view. AMAT. Thermawave.

 RPS Upgrades    -  Remote NF3 plasma clean. Lid upgrades and retrofits, HDP, PECVD, SACVD, WCVD

 Ceramic ESC   -  New improved designs, use existing OEM cathodes, AMAT. Lam. TEL.

 HDP   Ultima+   - new ENI RF racks, lid upgrade to RPS, new ceramic ESC, 3L or 6L RPS

  • Continuous improvement CIP, avoid obsolescence, improve COO
  • Improved efficiency, capability and product lifetime
  • Better sustainable technologies which improve environments