Improved ESC’s - AMAT, Lam, TEL, SPTS chambers

• New, proprietary ESC's for etch and HDPCVD chambers
• Use existing OEM cathodes, improved performance and cost of ownership

Technology details >. 

AMAT chambers	100mm, 150mm, 200mm
	MxP (+)	DPS	WxP (WEB)	Super-e
	EMAX	Ultima HDP	IPS	DPS+
	300mm
	DPS-2		Ultima HDP

 

LAM chambers	150mm, 200mm
	4520	4520XL	Excelan	9600, 9400, TCP

 

TEL  chambers	150mm, 200mm
	8500	DRM	SCCM

 

SPTS chambers	100mm, 150mm, 200mm
	APS, Synapse	ICP	DRIE