Improved ESC’s - AMAT, Lam, TEL, SPTS chambers
- New, proprietary ESC's for etch and HDPCVD chambers
- Use existing OEM cathodes, improved performance and cost of ownership
AMAT chambers | 100mm, 150mm, 200mm | |||
|---|---|---|---|---|
EMAX | IPS | |||
300mm | ||||
DPS-2 | Ultima HDP | |||
LAM chambers | 150mm, 200mm | |||
|---|---|---|---|---|
9600, 9400, TCP | ||||
TEL chambers | 150mm, 200mm | ||
|---|---|---|---|
8500 | DRM | SCCM | |
SPTS chambers | 100mm, 150mm, 200mm | ||
|---|---|---|---|
APS, Synapse | ICP | DRIE | |