Improved ESC’s - AMAT, Lam, TEL, SPTS chambers
- New, proprietary ESC's for etch and HDPCVD chambers
- Use existing OEM cathodes, improved performance and cost of ownership
AMAT chambers |
100mm, 150mm, 200mm |
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EMAX |
IPS |
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300mm |
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DPS-2 |
Ultima HDP |
LAM chambers |
150mm, 200mm |
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9600, 9400, TCP |
TEL chambers |
150mm, 200mm |
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8500 |
DRM |
SCCM |
SPTS chambers |
100mm, 150mm, 200mm |
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APS, Synapse |
ICP |
DRIE |