Improved ESC’s - AMAT, Lam, TEL, SPTS chambers

  • New, proprietary ESC's for etch and HDPCVD chambers
  • Use existing OEM cathodes, improved performance and cost of ownership

Technology details >

AMAT chambers

100mm, 150mm, 200mm

MxP (+)

DPS

WxP (WEB)

Super-e

EMAX

Ultima HDP

IPS

DPS+

300mm

DPS-2

Ultima HDP

 

LAM chambers

150mm, 200mm

4520 

4520XL

Excelan

9600, 9400, TCP

 

TEL  chambers

150mm, 200mm

8500

DRM

SCCM

 

SPTS chambers

100mm, 150mm, 200mm

APS, Synapse

ICP

DRIE