Ceramic ESC

  • All-new ceramic ESC (CESC) products of the highest quality
  • Supplied for AMAT, LAM and TEL chambers, fitted on standard on OEM cathodes
  • Outperform OEM and 3rd party ESC's using the latest materials and improved design
  • Single peice fabrication delivers outstanding process performance, lifetime.

More Details >

OEM
Chamber
Process
OEM Material
He Zones
SSSco CESC Benefits
AMATMxP  , WEB

Etch

- Oxide, Poly

- Tungsten

- Metal, 

PolyimideSingleReduced particles, no microarcing
DPSAlN PlateDualLonger lifetime
DPS+Improved WIW temperature
Super-eNo sticking or surface change
Ultima (+)HDPCVDCeramicBetter quality, consistency
LAMTCP (all)Etch; Poly Metal OxideCeramic PlateSingle and DualNo dechuck pins, less particles
Exelan 4520Better edge temperature control
SPEEDHDPCVDNo etch undercut of puck/plate
TEL8500Oxide EtchPolyimide and CeramicSingle and DualLower cost of ownership
DRMFits OEM cathodes
SCCMNo assembly at customer site