New ESC designs, improved materials


  • Each ESC designed to fit the standard OEM cathode - AMAT, Lam , SPTS, TEL.
  • Coulombic design for reliable chucking and dechucking, no sticking like JR type.
  • "Single-piece" design with no glue+plate, means much better lifetime and re-cycle/re-use
  • Improved process performance, less particles, uniform cooling to wafer edge

Contact us for more information about each ESC and your etch chamber.