Part Number 853-012175-003

  • Part Name: Harmonic Arm Drive
  • Vendor: Lam Research
  • Part Type: OEM

Part Details & Quote Request

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The following tables may show equivalent parts to the one you searched for. Those parts will display with a different part number.

Parts we can repair

Part NumberPart NameLead TimePriceWarrantyRepair ServiceRepair Request Form
853-012175-003Harmonic Arm Drive3 weeks$3,277.006 monthsSee repair informationRequest Repair

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