Part Number 853-015130-004

  • Part Name: Mini-Match RF Match
  • Vendor: Lam Research
  • Part Type: OEM

Part Details & Quote Request

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The following tables may show equivalent parts to the one you searched for. Those parts will display with a different part number.

Parts we can repair

Part Number Part Name Lead Time Price Warranty Repair Service Repair Request Form
853-015130-004 Mini-Match RF Match 3 weeks $2,841.00 6 months See repair information Request Repair

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