DPS Metal Etch, New Chamber Body
DPS Metal Etch chambers are very popular at 200mm and 150mm, for many years and many applications. The original AMAT chamber body part number 0040-02544 can now be replaced with a new equivalent chamber body.
After many years of production, chamber bodies can become difficult to maintain, and start to leak. Especially on metal etch applications.
This is the new chamber AAEA-C0004, made from highest quality 316L Aluminium and qualified since 2015 in many production fabs.
This chamber is suitable for further A-coat or Y-coat applications by customers, and comes as standard with a hard anodised coat.
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