HPD-CVD Ultima Plus 3 piece lid

This SSSco designed and manufactured lid replaces the OEM lid, and enables easier maintenance while reducing heat and thermal stress around the RPS unit. Fully integrated with the system interlocks.

Benefits include;

  • RPS generator easily accessible, and lower ambient air temperatures around the RPS. 
  • Lower temperatures can increase lifetime and reduce the onset of "PLASMA NOT DETECTED" faults.
  • Maintenance tasks are much easier when the chamber or RPS needs to be opened or worked on.
  • Easily removed without disconnecting any cables or water lines.

This is the lid fitted as standard on all Ultima+ chambers and systems remanufactured at SSSco. It is also availble as a user-installable part on it's own.

For more information contact sales@semiconservice.com