HTF Rotation Assembly

SSSco provides replacement parts for AMAT Centura HTF EPI and Poly rotation assemblies. 

Parts are drop-in replacements for the following part numbers:

Description OEM # SSS Co #

BELLOWS ASSY, UPPER MAG COUPLED ROTATION 

0040-87019

AADA-87019

BELLOWS ASSY, LOWER MAG COUPLED ROTATION 

0040-87020

AADA-87020

Motors

0090-00982

AAJA-00982

Rotation PCB (exchange)

0100-35085, 0100-00899, 0100-35073

ABAA-35085

For more information or to request a quote on any or our products please contact us.