Implanter Beamline Parts

P/No

AMAT P/N

BEAMLINE PARTS Description

Area

Source - OPM, 2nd source, or Custom

XR Implanter  models

GRP-001

n/a

AMAT Implanter9500-XR120  Graphite Inner, flight tube, all models (specify on order)

Beamline

Custom

ALL

GRP-002

n/a

AMAT Implanter9500-XR120  Graphite Outer, flight tube, all models (specify on order)

Beamline

Custom

ALL

MTR-003

1080-90078

MRS mini motor

Beamline

OPM

ALL

MTR-004

1080-01483

Extraction Drive Motor for xR

Beamline

OPM

ALL

POT-004

1210-90555

Extraction/MRS Potension meter

Beamline

OPM

ALL