Implanter Scan Arm Parts

P/No

AMAT P/N

SCAN ARM PARTS Description

Area

Source

XR Implanter  models

BRG-001

3500-90027

lock nut, Scan Drive shaft ball screw, upper

Scan Arm

OPM

PI9500-xR120

BRG-002

3060-90075

bearing, Scan Drive shaft ball screw, upper

Scan Arm

OPM

PI9500-xR120

BRG-003

3060-90076

bearing, Scan Drive shaft ball screw, lower

Scan Arm

OPM

PI9500-xR120

BRG-003-1

3060-90077

bearing, Scan Drive shaft ball screw, lower, inner

Scan Arm

OPM

PI9500-xR120

BRG-009

3060-90246

bearing, Scan Arm tension roller

Scan Arm

OPM

PI9500

BRG-010-1

3060-90254

bearing, Scan Arm TOP

Scan Arm

OPM

PI9500

BRG-011

3060-90287

bearing, Scan Arm V BELT center tension roller

Scan Arm

OPM

PI9500

BRG-012

3060-90288

bearing, Scan Arm V BELT Light tension roller

Scan Arm

OPM

PI9500

BRG-013

3060-90289

bearing, Scan Arm V BELT Light tension roller

Scan Arm

OPM

PI9500

BRG-014

3060-90290

bearing, Scan Arm V BELT Left tension roller

Scan Arm

OPM

PI9500

BRG-015

3060-90291

bearing, Scan Arm V BELT encorder                                          

Scan Arm

OPM

PI9500

BRG-016

3060-90292

bearing, Scan Arm Bottom

Scan Arm

OPM

PI9500

BRG-017

3060-90084

bearing, Mercury shaft

Scan Arm

OPM

PI9500-Quantum

BRG-018

3060-90057

bearing, Scan Arm tension, horizontal groove belt

Scan Arm

OPM

PI9500

BRG-021

3060-90286

bearing, Scan Arm V BELT TOP

Scan Arm

OPM

PI9500

BRG-025

3060-90120

bearing, left and right, Scan Drive shaft ball screw

Scan Arm

OPM

PI9500

CLIP-12

n/a

 9500-XR120 Moving Clips, 12", tip replaceable

Scan Arm

Custom

PI9500-xR120

CLIP-5・6

n/a

9500-XR120 Moving Clips, 5 and 6", tip replaceable

Scan Arm

Custom

PI9500-xR120

CLIP-8-CIP

n/a

9500-XR120  Moving Cips, 8" CIP wheel, tip replaceable

Scan Arm

Custom

PI9500-xR120

CLIP-8-OLD

n/a

9500-XR120  Moving Cips, 8" std wheel, tip replaceable

Scan Arm

Custom

PI9500-xR120

CLIP-8-Q

n/a

9500-XR120  Moving Cips, 8" CIP wheel Quantam, tip replaceable

Scan Arm

Custom

PI9500-xR120

CLIP-SPR-12

n/a

9500-XR120  Spring, 12 inch Moving Clips

Scan Arm

OPM

PI9500-xR120

CLIP-SPR-5・6

n/a

9500-XR120  Spring, 5 and 6 inch inch Moving Clips

Scan Arm

OPM

PI9500-xR120

CLIP-SPR-8

n/a

9500-XR120  Spring for 8 inch Moving Clips

Scan Arm

OPM

PI9500-xR120

CUP-001

0760-90020

coupling, tilt motor

Scan Arm

OPM

xR-Quantum

CUP-001-1

n/a

9500-XR120  coupling adopter, tilt motor

Scan Arm

OPM

xR-Quantum

INS-001

0020-90421

Wheel insulator 1

Scan Arm

OPM

ALL

ROT-001

0720-90443

Rotary Connector, Mercury tip

Scan Arm

OPM

ALL

SEL-001

3700-90274

Rotary Seal, VA-Type

Scan Arm

OPM

ALL

SEL-002

3700-90141

Rotary Seal, Non VA-Type

Scan Arm

OPM

PI9500

SFT-001

0040-92366

Bottom Shaft for vertical groove belt

Scan Arm

OPM

PI9500

UVJ-001

n/a

9500 -XR120 Universal joint, vertical groove

Scan Arm

OPM

PI9500

UVJ-002

n/a

9500-XR120 Universal joint, horizontal groove

Scan Arm

OPM

PI9500

VIB-002

1040-90039

vibration sensor

Scan Arm

OPM

PI9500-xR120

WEI-001

n/a

9500-XR120  Weight Balance small, 59g

Scan Arm

OPM

PI9500-Quantum

WEI-002

n/a

9500-XR120  Weight Balance large, 154g

Scan Arm

OPM

PI9500-Quantum