Implanter Scan Arm Parts
P/No |
AMAT P/N |
SCAN ARM PARTS Description |
Area |
Source |
XR Implanter models |
|
BRG-001 |
3500-90027 |
lock nut, Scan Drive shaft ball screw, upper |
Scan Arm |
OPM |
PI9500-xR120 |
|
BRG-002 |
3060-90075 |
bearing, Scan Drive shaft ball screw, upper |
Scan Arm |
OPM |
PI9500-xR120 |
|
BRG-003 |
3060-90076 |
bearing, Scan Drive shaft ball screw, lower |
Scan Arm |
OPM |
PI9500-xR120 |
|
BRG-003-1 |
3060-90077 |
bearing, Scan Drive shaft ball screw, lower, inner |
Scan Arm |
OPM |
PI9500-xR120 |
|
BRG-009 |
3060-90246 |
bearing, Scan Arm tension roller |
Scan Arm |
OPM |
PI9500 |
|
BRG-010-1 |
3060-90254 |
bearing, Scan Arm TOP |
Scan Arm |
OPM |
PI9500 |
|
BRG-011 |
3060-90287 |
bearing, Scan Arm V BELT center tension roller |
Scan Arm |
OPM |
PI9500 |
|
BRG-012 |
3060-90288 |
bearing, Scan Arm V BELT Light tension roller |
Scan Arm |
OPM |
PI9500 |
|
BRG-013 |
3060-90289 |
bearing, Scan Arm V BELT Light tension roller |
Scan Arm |
OPM |
PI9500 |
|
BRG-014 |
3060-90290 |
bearing, Scan Arm V BELT Left tension roller |
Scan Arm |
OPM |
PI9500 |
|
BRG-015 |
3060-90291 |
bearing, Scan Arm V BELT encorder |
Scan Arm |
OPM |
PI9500 |
|
BRG-016 |
3060-90292 |
bearing, Scan Arm Bottom |
Scan Arm |
OPM |
PI9500 |
|
BRG-017 |
3060-90084 |
bearing, Mercury shaft |
Scan Arm |
OPM |
PI9500-Quantum |
|
BRG-018 |
3060-90057 |
bearing, Scan Arm tension, horizontal groove belt |
Scan Arm |
OPM |
PI9500 |
|
BRG-021 |
3060-90286 |
bearing, Scan Arm V BELT TOP |
Scan Arm |
OPM |
PI9500 |
|
BRG-025 |
3060-90120 |
bearing, left and right, Scan Drive shaft ball screw |
Scan Arm |
OPM |
PI9500 |
|
|
n/a |
9500-XR120 Moving Clips, 12", tip replaceable |
Scan Arm |
Custom |
PI9500-xR120 |
|
CLIP-5・6 |
n/a |
9500-XR120 Moving Clips, 5 and 6", tip replaceable |
Scan Arm |
Custom |
PI9500-xR120 |
|
CLIP-8-CIP |
n/a |
9500-XR120 Moving Cips, 8" CIP wheel, tip replaceable |
Scan Arm |
Custom |
PI9500-xR120 |
|
CLIP-8-OLD |
n/a |
9500-XR120 Moving Cips, 8" std wheel, tip replaceable |
Scan Arm |
Custom |
PI9500-xR120 |
|
CLIP-8-Q |
n/a |
9500-XR120 Moving Cips, 8" CIP wheel Quantam, tip replaceable |
Scan Arm |
Custom |
PI9500-xR120 |
|
CLIP-SPR-12 |
n/a |
9500-XR120 Spring, 12 inch Moving Clips |
Scan Arm |
OPM |
PI9500-xR120 |
|
CLIP-SPR-5・6 |
n/a |
9500-XR120 Spring, 5 and 6 inch inch Moving Clips |
Scan Arm |
OPM |
PI9500-xR120 |
|
CLIP-SPR-8 |
n/a |
9500-XR120 Spring for 8 inch Moving Clips |
Scan Arm |
OPM |
PI9500-xR120 |
|
CUP-001 |
0760-90020 |
coupling, tilt motor |
Scan Arm |
OPM |
xR-Quantum |
|
CUP-001-1 |
n/a |
9500-XR120 coupling adopter, tilt motor |
Scan Arm |
OPM |
xR-Quantum |
|
INS-001 |
0020-90421 |
Wheel insulator 1 |
Scan Arm |
OPM |
ALL |
|
ROT-001 |
0720-90443 |
Rotary Connector, Mercury tip |
Scan Arm |
OPM |
ALL |
|
SEL-001 |
3700-90274 |
Rotary Seal, VA-Type |
Scan Arm |
OPM |
ALL |
|
SEL-002 |
3700-90141 |
Rotary Seal, Non VA-Type |
Scan Arm |
OPM |
PI9500 |
|
SFT-001 |
0040-92366 |
Bottom Shaft for vertical groove belt |
Scan Arm |
OPM |
PI9500 |
|
UVJ-001 |
n/a |
9500 -XR120 Universal joint, vertical groove |
Scan Arm |
OPM |
PI9500 |
|
UVJ-002 |
n/a |
9500-XR120 Universal joint, horizontal groove |
Scan Arm |
OPM |
PI9500 |
|
VIB-002 |
1040-90039 |
vibration sensor |
Scan Arm |
OPM |
PI9500-xR120 |
|
WEI-001 |
n/a |
9500-XR120 Weight Balance small, 59g |
Scan Arm |
OPM |
PI9500-Quantum |
|
WEI-002 |
n/a |
9500-XR120 Weight Balance large, 154g |
Scan Arm |
OPM |
PI9500-Quantum |