RTP Xe Temperature Probe Refurbishment

SSSco refurbish the AMAT RTP Xe Temperature Probe.

  • Optical probe is replaced
  • Seals replaced
  • Mechanical depth is set
  • Optical transmission and bandwidth tested to match new part 
  • This part is typically discarded but can be refurbished to like new condition by SSSco
  • This part is provided on an exchange basis 

SSSco has carried out an extensive analysis of both optical and mechanical properties, minimizing risk for the user in qualification of this process critical part.  

RTP Probe

Description OEM # SSSco #

RTP XE/XE+ temp probe



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