TxZ Gas Lines
SSSco manufactures and provides gas lines for AMAT Endura TxZ systems.
These are drop-in replacements including heat traces and TC probes. The lines are built using our state of the art Swagelok welding system and come fully leak and heat tested.
Recommended for stock in any fab using TxZ chambers, these lines are essential in chamber down situations.
SSSco stocks replacements for the following part numbers.
| Description | OEM # | SSSco # |
|---|---|---|
Gas line, PRCS Carrier, TxZ at Ch.2 and Ch.3 | AAFA-25237 | |
Gas Line, PRCS Carrier, Ampule | AAFA-24224 | |
Gas Line, PRCS Dump Ch.3 TxZ | AAFA-25675 | |
Gas Line Assy, Mid PRCS | AABA-13668 | |
|
|
|
Kit Chamber 2 TxZ Gas Lines, includes; | ACDC-13110 | |
Assembly, heat trace mixed, ampule | AABA-13664 | |
Assembly heat tape final gas line | AABA-13665 | |
Assembly heat tape long gas line pos 2 | AABA-13666 | |
|
|
|
Kit Chamber 3 TXZ gas lines, includes; | ACDC-13111 | |
Assembly, heat trace mixed, ampule | AABA-13664 | |
Assembly heat tape final gas line | AABA-13666 | |
Assembly heat tape long gas line pos 3 | AABA-13668 |