AMAT RF Match Refurbishment

High quality refurbishment for widely used types of RF Match for AMAT CVD (xL, DxZ, WxZ) and ETCH (MxP family) chambers, including part numbers;


Only the very best components are used, meeting or exceeding original OEM specifications. Incoming inspection and cleaning is done by highly experienced engineers. Each match is then refurbished and thoroughly tested to meet specification including;


Replace variable capacitor, replace all variable potentiometers

All silver plate hardware removed, cleaned, and inspected

All on board PCBs are calibrated and tested

Additional avaiable upgrade; DC bias PCB upgrade

RF matches are properly functionally tested and returned to customers with test data and 6 month warranty. Please contact us to arrange refurbishment of your Lam Mini-Match.