Harmonic Arm Drive refurbishment

Harmonic arm drives are used on all LAM research standalone platforms to accurately and reliably place the wafer. It is essential that a high quality refurbishment is completed for parts including 853-012123-001, 853-012123-004, 853-012123-500, 853-012175-001, 853-012175-003. 

Incoming inspection and cleaning is done by highly experienced engineers. All Harmonic Arm Drives are thoroughly taken apart and rebuilt using the proper OEM specified part numbers.  

  • All belts and bearings replaced
  • Sensors and stepper motors replaced

The Harmonic Arm Drive is then rigorously tested and verified for 500 succesful wafer transfers without fault. Drives are returned to customers with test data and 6 month warranty. Please contact us to arrange refurbishment of your Harmonic Arm Drive.