Slit Valve Refurbishment
SSSco offers full refurbishment of AMAT slit valve, and gate valve assemblies.
Slit Valve Refurbishment includes:
- Replacement of all seals (vacuum and pneumatic)
- Vacuum leak check of bellows
- Pneumatic actuation and sensor tests, and replacement if necessary
- Inspection and cleaning of entire assembly, including repair of defects
- Lubrication of actuator with OEM parts
- Six month warranty
Slit Valve after SSSco Refurbishment
Example part numbers include:
- 0010-01360
- 0010-76428
Gate Valve Refurbishment includes:
- Replacement of all seals (vacuum and pneumatic)
- Vacuum leak check; electrical, pneumatic, and actuation tested
- Inspection and cleaning of entire assembly
- Stepper motor inspection and testing (if equipped)
- Six month warranty
Example part numbers include:
3870-02632
3870-03519