ASM Epsilon™ E-FIT Plus Solution
Extend Platform Life. Modernize Performance. Simplify Control.
SSS Co delivers a comprehensive upgrade package for ASM Epsilon™ systems - designed to enhance reliability, improve process control, and extend tool life. Our controller retrofit and software solution modernizes every facet of the system, while mechanical upgrades enhance wafer handling and reduce maintenance. All upgrades are backed by our engineering expertise and proven field results.
Core Upgrades & Enhancements
- Complete replacement of legacy GESPAC controller with modern E-FiTs control platform
- User-friendly software with Windows 10 interface and built-in data logging via Microsoft SQL Server
- Fully integrated SECS/GEM and SMIF compatibility for factory automation
- Foxboro control eliminated—direct SCR control through controller interface
- Changeable SCR power ratio at each recipe step with E3 precision option
- Integrated troubleshooting and diagnostics: SCR view, defect zone detection, auto calibration, and lamp check functions
- Particle reduction with backside wafer handling system with low-particle robot integration and sag-free design
- Support for open-market I/O cards and MPI software compatibility
Platform Benefits
Simplified recipe setup and real-time process control
Shorten process time with faster deposition rate
Extended system lifespan with modern replacement parts
Eliminates hard-to-source and obsolete components
Enhances safety, reliability, and operational consistency
Why Choose SSS Co
- Proven modernization for ASM Epsilon™ systems
- In-depth engineering experience across wafer processing platforms
- Customized solutions and field-tested reliability
- End-to-end support from planning through installation