Ceramic ESC AMAT for Tungsten Etchback MkII and WEB

The latest CESC technology for all AMAT MxP polyimide ESC chambers. 100mm, 150mm, 200mm. These fit straight onto OEM polyimide or simple cathode with no change necessary. The improved design and better material means better process performance and lifetime. Particles are reduced as no sticking or breakdown of polyimide, microarcing is eliminated. Better temperature and etch uniformity. Enquire














0040-99998, 0040-99999, 0020-32163, 0010-10257, 0040-09797, 0020-32175