Ceramic ESC Super-e chamber

The latest CESC technology for AMAT Super-e chambers, fits straight onto OEM cathode. Better price, improved design and materials means longer lifetime and no sidewall etching which is seen with OEM plate design. Coulombic design and better material means no dechucking issues from the JR style due to surface condition changes.  Enquire


Equivalent Parts for 0010-05964, 0010-05966, 0040-0495, 0040-39990