Improved ESC Lam TCP chambers

The latest ESC technology for Lam standalone and cluster tools using 9400 or 9600 chambers. Improved materials means longer lifetime and lower cost of ownership. Using a "donut" design for the cathode, maintains correct leakage current performance.  Enquire

 

Equivalent Parts for Flat Type : 718-094523-261,  Flat Type :  718-092326-061,  Ring Type : 718-094756-061,  Flat Type : 718-094523-282,  Notch Type : 718-094523-281,  718-092326-081,  Ring Type : 718-094756-081,  Snake Type : 718-043893-80,