Ceramic ESC Lam TCP - all chambers

The latest CESC technology for Lam standalone and cluster tools. Improved design and materials means longer lifetime and reduced particles due to undercut, which is seen with OEM plate design. New design of He surface holes delivers better temperature uniformity and cooling. Enquire


Equivalent Parts for Flat Type : 718-094523-261,  Flat Type :  718-092326-061,  Ring Type : 718-094756-061,  Flat Type : 718-094523-282,  Notch Type : 718-094523-281,  718-092326-081,  Ring Type : 718-094756-081,  Snake Type : 718-043893-80,