CVG+ -  Constant Voltage Gradient upgrade

The constant voltage gradient CVG gas feedthrough operates between the RF power electrode and ground in a DxZ chamber lid. The CVG isolates process gases from mixing, ionizing, and forming a plasma prior to entering the process chamber.

The new CVG+ eliminates parts dis-assembly and re-assembly each time the lid is removed and replaced, saves significant time and reduces the need to replace lost or broken sub-components and parts. This upgrade is applicable for all DxZ chambers


Part number ACEC-42583