ENI RF Rack - replaces ETO rack
SSSco manufactures and delivers new ENI racks for AMAT HDP-CVD
- New smaller rack, harnessing and integration
- Replaces obsolete ETO generator racks on Applied Materials HDP CVD systems
- Nova ENI generators for higher reliability and higher power processing
Benefits
- Smaller footprint. Better process window with higher powers
- Greatly increased reliability, less chamber downtime.
- New ENI Nova generators