ENI RF Rack - replaces ETO rack

SSSco manufactures and delivers integrated ENI racks for AMAT HDP-CVD

Features

  • New smaller rack, harnessing and integration
  • Replaces obsolete ETO generator racks on Applied Materials HDP CVD systems
  • Current ENI generators for higher reliability and higher power processing

Benefits

  • Smaller footprint. Better process window with higher powers
  • Greatly increased reliability, less chamber downtime.
  • New ENI Nova generators