ENI RF Rack - replaces ETO rack

SSSco manufactures and delivers new ENI racks for AMAT HDP-CVD

  • New smaller rack, harnessing and integration
  • Replaces obsolete ETO generator racks on Applied Materials HDP CVD systems
  • Nova ENI generators for higher reliability and higher power processing


  • Smaller footprint. Better process window with higher powers
  • Greatly increased reliability, less chamber downtime.
  • New ENI Nova generators