Rotation Assembly Refurbishment & Upgrade

Precision. Performance. Longevity.

SSS Co offers a comprehensive rotation assembly refurbishment and upgrade service designed to enhance tool performance, extend service life, and improve reliability. Our process targets key wear points and integrates new technology for greater throughput, accuracy, and maintainability.

Rotation Assembly

Refurbishment Scope & Upgrades

  • Simple modification: swap out air-type cylinder for EPICREW actuator
  • PCB added to existing rotation controller
  • Signal cable modified for new actuator compatibility
  • Full calibration performed via teach pendant
  • All consumables replaced: bearings, O-rings, and seals
  • Full disassembly and cleaning of components exposed to HCl/TCS gases
  • Electro-polishing to restore metal surfaces and remove contamination
  • Rotation tested on custom fixture for leaks, wobble, and operational integrity
  • Latest motor, ROM, and grip-action features installed

Upgrade Benefits

Higher throughput through stable, high-speed rotation
Significantly reduced vibration and backside wafer damage
Increased rotation accuracy and positioning precision
Lower maintenance requirements with field-tested hardware
Improved stability and consistency across cycles

Why Choose SSS Co

  • Proven rotation assembly solutions backed by fab-tested reliability
  • Integrated upgrades that work with existing tool infrastructure
  • Extensive refurbishing procedures restore both function and cleanliness
  • Rapid turnaround with precision calibration and final QA