RPS Lid Upgrade Kits

SSSco upgrades 200mm and 300mm systems with the latest NF3 remote plasma systems. Avaliable for Centura and Producer.

Paragon delivers up to 8 liters of NF3 flow, using the latest materials and ignition designs to improve particles, reliability and cost of ownership.

SSSco delivers new RPS and integration hardware. SSSco has installed multiple Paragon units on Centura and Producer -  200mm and 300mm systems.

Paragon enabless an improved process window allowing users to optimise chamber cleans. Replacing Astron with Paragon means better reliability