Paragon RPS Upgrade Kits

SSSco upgrades AMAT 200mm and 300mm CVD chambers with the latest Paragon NF3 RPS remote plasma systems.

Paragon RPS units are installed on HDP Ultima 200mm and 300mm, and on Producer 200mm and 300mm chambers. This is an upgrade from Astron 2L or 3L models. Benefits include;

    •Better reliability and uptime

    •Larger process window

Paragon delivers up to 8 liters of NF3 and uses the latest materials and design to improve lifetime, ignition reliability and particle performance.

SSSco delivers new Paragon RPS units with integration hardware.