PVD Magnet Repair
SSSco provides replacement and refurbishment for many AMAT PVD magnet assemblies.
Magnets that we repair include:
- 0010-21810 G-12 Durasource Magnet
- 0010-21403 TTN Durasource Magnet
- 0010-20768 G-12 8" Magnet
- 0010-20225 AL A-Type Magnet
- 0010-20224 AL A-Type 6" Magnet
- 0010-20258 Ti A- Type Magnet
- 0010-20328 Ti Durasource Magnet
Before Refurbishment: After SSSco Refurbishment:
Problems:
Original magnets are exposed to DI water causing the TEM coating to erode
Eroding magnets create rust causing low DI water resistivity
Magnets lose original shape as erosion accelerates deforming the magnet array. The array eventually contacts the backside of the target.
Magnets lose strength over time due to heating and natural magnetic decay
SSSco Solution:
Incoming magnet inspection and mapping
Disassemble, clean all parts
Check surface flatness of magnet array
Re-saturate magnets or replace with new corrosion resistant nickel coated
Reassemble and map refurbished magnet
For more information, contact SSSco.