Gate Drive Assembly Refurbishment
Gate Drive Assemblies for LAM Research standalone tools, a high quality refurbishment is completed for parts including 853-012200-002, 853-012261-001, 853-012875-001, 853-442064-002
Incoming inspection and cleaning is done by highly experienced engineers. Each assembly is then refurbished and thoroughly tested to meet specification including;
- Air cylinder, bearings, retaining pins and pneumatic fittings are replaced
- Sensors are tested, inspected and replaced as needed
- Door position adjusted for proper operation
- Door assembly is installed and tested on custom test fixture
Assemblies are returned to customers with test data and 6 month warranty. Please contact us to arrange refurbishment of your Gate Drive Assembly.