Semiconductor Support Services Co. When it has to be right…now.
  • Contact Us
  • FAQ
  • LinkedIn
  • Twitter
  • RSS
  • Home
  • Parts & Equipment
    • Parts Search Engine
    • Penulator Product Family
    • Equipment For Sale
    • New V452 SBC boards
  • Upgrades & Retrofits
    • Upgrades
    • Systems
    • ESC Products
  • Repair Center
  • Support
    • Customer Support Services
    • Terms, Returns, Warranty
    • FAQ
  • Blog
  • Company
    • Company Overview
    • Mission Statement
    • Company HIstory
  • Home

Lam Etch

SSSco delivers high quality upgrades and repairs for users of Lam Etch systems, including;

Rainbow, Alliance, 2300, 4420, 4520, 9400, 9600, Exelan, Kiyo - mainframe and chambers

  • Parts
  • Upgrades & Retrofits
  • Services
  • Available Equipment

Lam Etch Parts

Search for more parts

Lam Etch Upgrades & Retrofits

  • Ceramic ESC Lam 4520, 4520XL, EXCELAN
  • Improved ESC Lam TCP chambers
  • Improved ESC’s - AMAT, Lam, TEL, SPTS chambers
  • LoFAT Sled Upgrade and Remanufacture
  • Repairs - Scope of Work

Services

  • DSQ RF Match Refurbishment
  • Gate Drive Assembly Refurbishment
  • Harmonic Arm Drive refurbishment
  • Heat Exchanger and Chiller Remanufacture - 1 Year Warranty
  • Lam Etch - ENI RF Match Repair
  • Lam Mini-Match Refurbishment
  • SMC Chiller Repair and Refurbishment
  • T-Match Refurbishment
  • TCP 9600 Match Refurbishment

Looking for Available Equipment?

See equipment

Semiconductor Support Services Co.

Semiconductor Support Services Co. Headquarters
4715 Steiner Ranch Blvd
Austin, TX 78732
Phone: +1-512-267-7087 | Fax: 512-267-7088
sales@semiconservice.com
  • Contact Us
  • FAQ
  • Legal Disclaimers
  • Site Policies
  • Site Map
  • © 2023 SSSCo