Lam Etch
SSSco delivers high quality upgrades and repairs for users of Lam Etch systems, including;
Rainbow, Alliance, 2300, 4420, 4520, 9400, 9600, Exelan, Kiyo - mainframe and chambers
Lam Etch Parts
Search for more partsLam Etch Upgrades & Retrofits
- Ceramic ESC Lam 4520, 4520XL, EXCELAN
- Improved ESC Lam TCP chambers
- Improved ESC’s - AMAT, Lam, TEL, SPTS chambers
- LoFAT Sled Upgrade and Remanufacture
- Repairs - Scope of Work
Services
- DSQ RF Match Refurbishment
- Gate Drive Assembly Refurbishment
- Harmonic Arm Drive refurbishment
- Heat Exchanger and Chiller Remanufacture - 1 Year Warranty
- Lam Etch - ENI RF Match Repair
- Lam Mini-Match Refurbishment
- SMC Chiller Repair and Refurbishment
- T-Match Refurbishment
- TCP 9600 Match Refurbishment