Lam Etch

SSSco delivers high quality upgrades and repairs for users of Lam Etch systems, including;

Rainbow, Alliance, 2300, 4420, 4520, 9400, 9600, Exelan, Kiyo - mainframe and chambers

• Parts
• Upgrades & Retrofits
• Services
• Available Equipment

Lam Etch Parts

Lam Etch Upgrades & Retrofits

• Ceramic ESC
• Ceramic ESC EXELAN, 4520
• Ceramic ESC Lam TCP - all chambers
• LoFAT Sled Upgrade and Remanufacture

Services

• DSQ RF Match Refurbishment
• Gate Drive Assembly Refurbishment
• Harmonic Arm Drive refurbishment
• Heat Exchanger and Chiller Remanufacture - 1 Year Warranty
• Lam Etch - ENI RF Match Repair
• Lam Mini-Match Refurbishment
• SMC Chiller Repair and Refurbishment
• T-Match Refurbishment
• TCP 9600 Match Refurbishment

Looking for Available Equipment?