RPS Upgrades

SSSco upgrades older RF clean and microwave clean to the latest MKS Astron and Paragon RPS technology for advanced chamber cleans using NF3. RPS is now commonplace on CVD and some other process chambers and improves process performance, increases throughput, lowers cost of ownership and reduces emmissions.

Paragon 1

SSSco upgrades are available for PECVD, HDP, SiNgen and SACVD. Lid upgrade kits replace RF and microwave clean systems. 

SSSco provides a 1 year warranty, and a qualified integration developed with MKS. SSSco is an authorized MKS repair partner for Astron products.


Paragon 2


AMAT Producer 300MM twin Astron 2L to Paragon upgrade




Paragon 3

AMAT Ultima+TM with Astron I to Paragon upgrade