RPS Lid Upgrades, from RF or microwave clean to NF3 remote plasma
SSSco provides a range of RPS upgrade kits for AMAT CVD chambers. RPS clean can be used on P5000, Centura and Producer platforms, and replaces RF or microwave clean systems.
Benefits include;
- Better chamber clean and particle reduction
- Longer periods between chamber clean
- Reduction in use of expensive etch gasses
- Reduction in cost of comsumable and process kit cleaning
Chambers which can be upgraded include;
- DxL Lamp Heated
- DxZ all types
- WxZ
- Ultima
RPS units supplied with full integration include;
- Astron 2L and 3L
- Paragon
For HDP and Producer chambers which have older RPS units already installed including Astex, SSSco supplies RPS upgrades to the latest MKS Paragon technology