Ultima+ Chamber upgrades

Ultima+ is a chamber for HDP-CVD, which was upgraded from the original Ultima version and added many new features including;

The RF system is upgraded from ETO racks to new ENI Nova racks and generators for higher RF power and stability.

The chamber ckean is upgraded from microwave to RPS using NF3, and can be either MKS Astron 3L or MKS Paragon 8L

SSSco manufactures and delivers a range of high quality Ultima+ upgrades, and have shipped hundreds of upgrades, systems and chambers to customers globally. The available upgrades can be summarised as follows;


For more details on each item  - < read more here