Ultima to Ultima+ Chamber upgrades

The HDP CVD chamber by AMAT is used widely in global fabs, and has undergone several revisions during it's lifetime;

Ultima -> Ultima+ -> UltimaX (larger turbo)


Each AMAT revision includes upgrades which either increases process capability or reliability - or both. Increasingly, obsolete parts have made existing chambers in some cases very unreliable for customers.  Upgrades to these chambers are now an increasing need for many SSSco customers.

 

SSSco has engineered a series of high quality and critical upgrades, and shipped hundreds of upgrades, systems and chambers to customers globally. The available upgrades can be summarised as follows;

 

 

For more details on each item - which can be supplied in most cases individually as an upgrade - < read more here