Ultima HDP CVD
SSSco supports AMAT Ultima systems and chambers since 2003, delivering high value upgrades, repairs, parts and services. We offer 200mm and 300mm solutions.
Ultima HDP CVD Parts
SSSco ensures high quality parts and modules are delivered to precisely match customer requirements. In addition, we have a large inventory of surplus parts in our Parts Search
Search for more partsUltima HDP CVD Upgrades & Retrofits
Improved performance and extended lifetime. We offer Ultima to Ultima+ upgrades including new ENI racks and RPS lid upgrades.
- AMAT 0, AMAT 1, Upgrade to new SMC
- Ceramic ESC AMAT Ultima and Ultima+
- DPS Chamber, Refurbishment of DTCU
- ENI RF Rack - replaces ETO rack
- HDPCVD Centura Ultima+ Chiller Upgrade
- Improved ESC’s - AMAT, Lam, TEL, SPTS chambers
- New Robot Drivers
- New V452 Single Board Computer SBC PCB’s
- Paragon RPS Upgrade Kits
- PDS Penulator Data System
- PDS Remote
- Penulator Pro Monitor
- Penulator™ Upgrades
- Repairs - Scope of Work
- RPS Lid Upgrades, from RF or microwave clean to NF3 remote plasma
- Ultima+ Chamber upgrades
- Water Manifold PLUS for HDP ULTIMA and ULTIMA+
Services
SSSco partners with customers and qualified suppliers to deliver our services around the world.
- Customer Support Services
- Endura, Centura 15V DC Power Supply Repair
- Gas line orbital welding service
- Heat Exchanger and Chiller Remanufacture - 1 Year Warranty
- HP, HP+, VHP Robot Driver Rebuild and Repair
- Orienter Chamber Laser Refurbishment
- PCB Repair Service
- Replacement AMAT PCB Circuit Boards
- RPS Astron CIP - Refurbishment and Repair
- SMC Chiller Repair and Refurbishment
