Implanter - General Parts

P/No

AMAT P/N

IMPLANTER GENERAL PARTS Description

Area

Source

XR Implanter  models

DKT-001

n/a

9500-XR120  exhaust duct, dry pump, S shape for 9500/9500xR

vacuum system

OPM

PI9500-xR

DKT-002

n/a

9500-XR120 exhaust duct, dry pump, straight for xR80, xR120, ｘR

vacuum system

OPM

xR80,Leap,120

DKT-004

n/a

9500-XR120  exhaust duct, dry pump, straight for Quantum

vacuum system

OPM

Quantum

ETB-001

0090-08621

Extention board

Other

OPM

ALL

FAN-002

0600-90026

Cooling fan　115VAC 120x120×38mm　with connector

Electronics

Custom

ALL

FAN-003

0600-90006

Cooling fan 115VAC 80x80×38mm　with connector

Electronics

Custom

ALL

FAN-005

n/a

9500-XR120  Cooling fan, VME CPU, 12VDC 92x92×25mm

Electronics

Custom

ALL

FCBL-001

0150-91741
0150-91745
0150-91748

Fiber cables, SMA plug on both ends

Electronics

OPM

ALL

FCBL-002

0150-91172
0150-91191

Fiber cable with spring, plastic and metal SMA plug

Electronics

OPM

ALL

FCBL-002-1

0150-91172
0150-91191

Fiber cable with NO spring, plastic and metal SMA plug

Electronics

OPM

ALL

HDD-001

n/a

9500-XR120  HDD 18.4GB 3.5"

Electronics

Custom

PI9500-ｘR

HEX-001

n/a

9500-XR120  Grundfos pump, heat exchange recirculation pump (successor)

Facility

OPM

ALL

HEX-002

n/a

9500-XR120  Heat Exchanger core, male

Facility

OPM

ALL

HEX-003

n/a

9500-XR120  Heat Exchanger core, female

Facility

OPM

ALL

HFB-001

n/a

AMAT 9500-XR120  Heat Exchanger Filter Ball

Facility

OPM

ALL

HFB-002

n/a

AMAT 9500-XR120  Heat Exchanger Filter Ball, with pressure gauge

Facility

OPM

ALL

IOA-001

n/a

AMAT 9500-XR120  Ionizer aero bar

Facility

OPM

Quantum

ISO-001

n/a

AMAT 9500-XR120  Ring for ISO valves

vacuum system

OPM

ALL

ISO-001-1

n/a

AMAT 9500-XR120  Balls for ISO valves, 10

vacuum system

OPM

ALL

LED-001-G

n/a

AMAT 9500-XR120  LED, status lamp, green

Facility

OPM

ALL

LED-001-PW

n/a

AMAT 9500-XR120  LED, status lamp, white

Facility

OPM

ALL

LED-001-R

n/a

AMAT 9500-XR120  LED, status lamp, red

Facility

OPM

ALL

LTP-001

1120-00830

Light pen

Electronics

OPM

PI9500-ｘR

MANIFOLD

n/a

AMAT 9500-XR120  Cooling Water Manifold to prevent ABS part rupture

Facility

Custom

ALL

PSU-001

0090-91641

Power supply, multi purpose, 65W 4outputs

Electronics

OPM

ALL

PSU-002

0090-91640

Power supply, multi purpose, 45W 4outputs

Electronics

OPM

ALL

SFM-001

n/a

AMAT 9500-XR120  source flowmeter, 160LPH

Facility

OPM

ALL

SFM-002

n/a

AMAT 9500-XR120  source flowmeter, 250LPH

Facility

OPM

ALL

SFM-003

n/a

AMAT 9500-XR120  source flowmeter, 1000LPH

Facility

OPM

ALL

SFM-004

n/a

AMAT 9500-XR120  source flowmeter, 1600LPH

Facility

OPM

ALL

SFM-005

n/a

AMAT 9500-XR120  limit switch

Facility

OPM

ALL

TIM-001

n/a

AMAT 9500-XR120  Timer relay inside DD I/F chasis

Electronics

OPM

PI9500-xR120

TIM-002

n/a

AMAT 9500-XR120  Contactor Relay in main PDU (K2/K16）

Electronics

OPM

PI9500-xR120

TOU-PNL-003

n/a

AMAT 9500-XR120  Touch monitor for control module

Electronics

Custom

PI9500-ｘR

VAL-004

3870-90121

Solenoid valve, 3-way

Electronics

OPM

PI9500-xR120

VAL-005

n/a

AMAT 9500-XR120 Solenoid valve, 3-port

Electronics

OPM

PI9500-xR120

VAL-006

n/a

AMAT 9500-XR120 Solenoid valve, 4 port

Electronics

OPM

PI9500-xR120

VAL-007

n/a

AMAT 9500-XR120  Solenoid valve, 3/2way

Electronics

OPM

PI9500-xR120

VAL-KIT-1

n/a

AMAT 9500-XR120  W/L Air Flow Valve improvement kit to prevent vacuum system break by malfunction

vacuum system

Custom

PI9500-xR120