Implanter - General Parts
|
P/No |
AMAT P/N |
IMPLANTER GENERAL PARTS Description |
Area |
Source |
XR Implanter models |
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|
DKT-001 |
n/a |
9500-XR120 exhaust duct, dry pump, S shape for 9500/9500xR |
vacuum system |
OPM |
PI9500-xR |
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|
DKT-002 |
n/a |
9500-XR120 exhaust duct, dry pump, straight for xR80, xR120, ｘR |
vacuum system |
OPM |
xR80,Leap,120 |
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|
DKT-004 |
n/a |
9500-XR120 exhaust duct, dry pump, straight for Quantum |
vacuum system |
OPM |
Quantum |
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|
ETB-001 |
0090-08621 |
Extention board |
Other |
OPM |
ALL |
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|
FAN-002 |
0600-90026 |
Cooling fan 115VAC 120x120×38mm with connector |
Electronics |
Custom |
ALL |
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|
FAN-003 |
0600-90006 |
Cooling fan 115VAC 80x80×38mm with connector |
Electronics |
Custom |
ALL |
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|
FAN-005 |
n/a |
9500-XR120 Cooling fan, VME CPU, 12VDC 92x92×25mm |
Electronics |
Custom |
ALL |
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|
FCBL-001 |
0150-91741 |
Fiber cables, SMA plug on both ends |
Electronics |
OPM |
ALL |
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|
FCBL-002 |
0150-91172 |
Fiber cable with spring, plastic and metal SMA plug |
Electronics |
OPM |
ALL |
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|
FCBL-002-1 |
0150-91172 |
Fiber cable with NO spring, plastic and metal SMA plug |
Electronics |
OPM |
ALL |
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|
HDD-001 |
n/a |
9500-XR120 HDD 18.4GB 3.5" |
Electronics |
Custom |
PI9500-ｘR |
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|
HEX-001 |
n/a |
9500-XR120 Grundfos pump, heat exchange recirculation pump (successor) |
Facility |
OPM |
ALL |
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|
HEX-002 |
n/a |
9500-XR120 Heat Exchanger core, male |
Facility |
OPM |
ALL |
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|
HEX-003 |
n/a |
9500-XR120 Heat Exchanger core, female |
Facility |
OPM |
ALL |
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|
HFB-001 |
n/a |
AMAT 9500-XR120 Heat Exchanger Filter Ball |
Facility |
OPM |
ALL |
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|
HFB-002 |
n/a |
AMAT 9500-XR120 Heat Exchanger Filter Ball, with pressure gauge |
Facility |
OPM |
ALL |
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|
IOA-001 |
n/a |
AMAT 9500-XR120 Ionizer aero bar |
Facility |
OPM |
Quantum |
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|
ISO-001 |
n/a |
AMAT 9500-XR120 Ring for ISO valves |
vacuum system |
OPM |
ALL |
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|
ISO-001-1 |
n/a |
AMAT 9500-XR120 Balls for ISO valves, 10 |
vacuum system |
OPM |
ALL |
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|
LED-001-G |
n/a |
AMAT 9500-XR120 LED, status lamp, green |
Facility |
OPM |
ALL |
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|
LED-001-PW |
n/a |
AMAT 9500-XR120 LED, status lamp, white |
Facility |
OPM |
ALL |
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|
LED-001-R |
n/a |
AMAT 9500-XR120 LED, status lamp, red |
Facility |
OPM |
ALL |
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|
LTP-001 |
1120-00830 |
Light pen |
Electronics |
OPM |
PI9500-ｘR |
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|
n/a |
AMAT 9500-XR120 Cooling Water Manifold to prevent ABS part rupture |
Facility |
Custom |
ALL |
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|
PSU-001 |
0090-91641 |
Power supply, multi purpose, 65W 4outputs |
Electronics |
OPM |
ALL |
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|
PSU-002 |
0090-91640 |
Power supply, multi purpose, 45W 4outputs |
Electronics |
OPM |
ALL |
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|
SFM-001 |
n/a |
AMAT 9500-XR120 source flowmeter, 160LPH |
Facility |
OPM |
ALL |
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|
SFM-002 |
n/a |
AMAT 9500-XR120 source flowmeter, 250LPH |
Facility |
OPM |
ALL |
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|
SFM-003 |
n/a |
AMAT 9500-XR120 source flowmeter, 1000LPH |
Facility |
OPM |
ALL |
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|
SFM-004 |
n/a |
AMAT 9500-XR120 source flowmeter, 1600LPH |
Facility |
OPM |
ALL |
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|
SFM-005 |
n/a |
AMAT 9500-XR120 limit switch |
Facility |
OPM |
ALL |
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|
TIM-001 |
n/a |
AMAT 9500-XR120 Timer relay inside DD I/F chasis |
Electronics |
OPM |
PI9500-xR120 |
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|
TIM-002 |
n/a |
AMAT 9500-XR120 Contactor Relay in main PDU (K2/K16） |
Electronics |
OPM |
PI9500-xR120 |
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|
TOU-PNL-003 |
n/a |
AMAT 9500-XR120 Touch monitor for control module |
Electronics |
Custom |
PI9500-ｘR |
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|
VAL-004 |
3870-90121 |
Solenoid valve, 3-way |
Electronics |
OPM |
PI9500-xR120 |
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|
VAL-005 |
n/a |
AMAT 9500-XR120 Solenoid valve, 3-port |
Electronics |
OPM |
PI9500-xR120 |
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|
VAL-006 |
n/a |
AMAT 9500-XR120 Solenoid valve, 4 port |
Electronics |
OPM |
PI9500-xR120 |
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|
VAL-007 |
n/a |
AMAT 9500-XR120 Solenoid valve, 3/2way |
Electronics |
OPM |
PI9500-xR120 |
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|
VAL-KIT-1 |
n/a |
AMAT 9500-XR120 W/L Air Flow Valve improvement kit to prevent vacuum system break by malfunction |
vacuum system |
Custom |
PI9500-xR120 |
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