Implanter Wafer Loader Parts

P/No

AMAT P/N

WAFER LOADER PARTS Description

Area

Source

XR Implanter  models

ARM-001

0040-95199

Hollow Gripper, Y-arm, 200mm

Waferloader

OPM

PI9500-xR

BRG-004

3060-00229

guide bearing, blade box assy

Waferloader

OPM

PI9500-xR120

BRG-005

3060-00230

drive bearing, blade box

Waferloader

OPM

PI9500-xR120

BRG-006

3060-00231

guide bearing, Cassette Indexer

Waferloader

OPM

PI9500-xR120

BRG-007

3060-00232

Cassette Indexer DriveTube side, adjustment bearing 

Waferloader

OPM

PI9500-xR120

BRG-008

3060-00233

Cassette Indexer Bar Idler side, adjustment bearing

Waferloader

OPM

PI9500-xR120

BRG-022

3060-90277

sield bearing, Cassette Indexer Guide

Waferloader

OPM

PI9500

BRG-023

3060-90278

shield bearing, Cassette Indexer, Drive Tube side adjustment

Waferloader

OPM

PI9500

BRG-024

3060-90279

shield bearing, Cassette Indexer, barldler side adjustment

Waferloader

OPM

PI9500

COV-001

0020-83302

U shape cover, hollow gripper, 200mm A-Type

Waferloader

OPM

PI9500-xR120

COV-002

0020-05764

U shape cover, hollow gripper, 200mm A-Type

Waferloader

OPM

PI9500-xR120

CUP-002

0760-90018

coupling, arm motor

Waferloader

OPM

PI9500-xR120

FNG-001

0020-84222

finger, Hollow Gripper, black

Waferloader

OPM

PI9500-xR120

FNG-002

0020-85167

finger, hollow Gripper, white

Waferloader

OPM

PI9500-xR120

FNG-003

0020-98985

finger, std Gripper, 125mm, black

Waferloader

OPM

PI9500-xR120

FNG-004

0020-96466

finger, std Gripper, 125mm, white

Waferloader

OPM

PI9500-xR120

FNG-005

0021-90783

finger, gripper, Quantum

Waferloader

OPM

Quantum

HOU-001

0020-83729

U-shape housing, hollow gripper, 200mm

Waferloader

OPM

PI9500-xR120

HOU-002

n/a

AMAT Implanter9500-XR120  U-shape housing, hollow gripper, 150mm

Waferloader

OPM

PI9500-xR120

LEADSCRW-001

0045-90049         0690-90107

Leadscrew 300mm with nut and coupling

WaferLoader

OPM

PI9500-xR120

LEADSCRW-002

3710-90010     0690-90107

Leadscrew 312mm with nut and coupling

WaferLoader

OPM

PI9500-xR120

MTG-001

0020-94191

Resin bracket to fix std Gripper cylinder

WaferLoader

OPM

PI9500

POT-001

1210-90737 D

potention meter, arm

WaferLoader

OPM

PI9500-xR120

POT-002-3

1210-90731

potention meter, blade

WaferLoader

OPM

PI9500-xR120

POT-003

1210-90737

German Potention meter, arm

WaferLoader

OPM

PI9500-xR120

ROL-001

0020-83961

Roller Spring

WaferLoader

OPM

PI9500-xR120

SPR-001

0020-96167

leaf spring, waferloader (L/L Door FLEXURE)

WaferLoader

OPM

PI9500-xR120

SPR-002

0020-83142

Spring Drive

WaferLoader

OPM

PI9500-xR120

SPU-001

n/a

9500-XR120  Shoe Pick Up 125mm 3mmEDGE PEEK

WaferLoader

OPM

PI9500-xR120

SPU-002

0041-35673

Shoe Pick Up 200mm 1.5mmEDGE PEEK

WaferLoader

Custom

PI9500-xR120

SPU-003

0040-97187

Shoe Pick Up 200mm 3mm EDGE 30 degree PEEK

WaferLoader

OPM

PI9500-xR120

SPU-004

0041-35673

Shoe Pick Up 200mm 1.5mm EDGE Semitron, black

WaferLoader

OPM

PI9500-xR120

SPU-005

0040-97187

Shoe Pick Up 200mm  3mm EDGE 30 degree Semitron

WaferLoader

Custom

PI9500-xR120

SPU-006

0040-97186

Shoe Pick Up 150mm  3mm EDGE 30 degree PEEK

WaferLoader

OPM

PI9500-xR120

SPU-007

n/a

9500-XR120 Shoe Pick Up 150mm  3mm EDGE 55° PEEK

WaferLoader

Custom

PI9500-xR120

WAS-001

0020-81151

Washer Lock

WaferLoader

OPM

PI9500-xR120