Implanter Wafer Loader Parts
|
P/No |
AMAT P/N |
WAFER LOADER PARTS Description |
Area |
Source |
XR Implanter models |
|
ARM-001 |
0040-95199 |
Hollow Gripper, Y-arm, 200mm |
Waferloader |
OPM |
PI9500-ｘR |
|
BRG-004 |
3060-00229 |
guide bearing, blade box assy |
Waferloader |
OPM |
PI9500-xR120 |
|
BRG-005 |
3060-00230 |
drive bearing, blade box |
Waferloader |
OPM |
PI9500-xR120 |
|
BRG-006 |
3060-00231 |
guide bearing, Cassette Indexer |
Waferloader |
OPM |
PI9500-xR120 |
|
BRG-007 |
3060-00232 |
Cassette Indexer DriveTube side, adjustment bearing |
Waferloader |
OPM |
PI9500-xR120 |
|
BRG-008 |
3060-00233 |
Cassette Indexer Bar Idler side, adjustment bearing |
Waferloader |
OPM |
PI9500-xR120 |
|
BRG-022 |
3060-90277 |
sield bearing, Cassette Indexer Guide |
Waferloader |
OPM |
PI9500 |
|
BRG-023 |
3060-90278 |
shield bearing, Cassette Indexer, Drive Tube side adjustment |
Waferloader |
OPM |
PI9500 |
|
BRG-024 |
3060-90279 |
shield bearing, Cassette Indexer, barldler side adjustment |
Waferloader |
OPM |
PI9500 |
|
COV-001 |
0020-83302 |
U shape cover, hollow gripper, 200mm A-Type |
Waferloader |
OPM |
PI9500-xR120 |
|
COV-002 |
0020-05764 |
U shape cover, hollow gripper, 200mm A-Type |
Waferloader |
OPM |
PI9500-xR120 |
|
CUP-002 |
0760-90018 |
coupling, arm motor |
Waferloader |
OPM |
PI9500-xR120 |
|
FNG-001 |
0020-84222 |
finger, Hollow Gripper, black |
Waferloader |
OPM |
PI9500-xR120 |
|
FNG-002 |
0020-85167 |
finger, hollow Gripper, white |
Waferloader |
OPM |
PI9500-xR120 |
|
FNG-003 |
0020-98985 |
finger, std Gripper, 125mm, black |
Waferloader |
OPM |
PI9500-xR120 |
|
FNG-004 |
0020-96466 |
finger, std Gripper, 125mm, white |
Waferloader |
OPM |
PI9500-xR120 |
|
FNG-005 |
0021-90783 |
finger, gripper, Quantum |
Waferloader |
OPM |
Quantum |
|
HOU-001 |
0020-83729 |
U-shape housing, hollow gripper, 200mm |
Waferloader |
OPM |
PI9500-xR120 |
|
HOU-002 |
n/a |
AMAT Implanter9500-XR120 U-shape housing, hollow gripper, 150mm |
Waferloader |
OPM |
PI9500-xR120 |
|
LEADSCRW-001 |
0045-90049 0690-90107 |
Leadscrew 300mm with nut and coupling |
WaferLoader |
OPM |
PI9500-xR120 |
|
LEADSCRW-002 |
3710-90010 0690-90107 |
Leadscrew 312mm with nut and coupling |
WaferLoader |
OPM |
PI9500-xR120 |
|
MTG-001 |
0020-94191 |
Resin bracket to fix std Gripper cylinder |
WaferLoader |
OPM |
PI9500 |
|
POT-001 |
1210-90737 D |
potention meter, arm |
WaferLoader |
OPM |
PI9500-xR120 |
|
POT-002-3 |
1210-90731 |
potention meter, blade |
WaferLoader |
OPM |
PI9500-xR120 |
|
POT-003 |
1210-90737 |
German Potention meter, arm |
WaferLoader |
OPM |
PI9500-xR120 |
|
ROL-001 |
0020-83961 |
Roller Spring |
WaferLoader |
OPM |
PI9500-xR120 |
|
SPR-001 |
0020-96167 |
leaf spring, waferloader (L/L Door FLEXURE) |
WaferLoader |
OPM |
PI9500-xR120 |
|
SPR-002 |
0020-83142 |
Spring Drive |
WaferLoader |
OPM |
PI9500-xR120 |
|
SPU-001 |
n/a |
9500-XR120 Shoe Pick Up 125mm 3mmEDGE PEEK |
WaferLoader |
OPM |
PI9500-xR120 |
|
SPU-002 |
0041-35673 |
Shoe Pick Up 200mm 1.5mmEDGE PEEK |
WaferLoader |
Custom |
PI9500-xR120 |
|
SPU-003 |
0040-97187 |
Shoe Pick Up 200mm 3mm EDGE 30 degree PEEK |
WaferLoader |
OPM |
PI9500-xR120 |
|
SPU-004 |
0041-35673 |
Shoe Pick Up 200mm 1.5mm EDGE Semitron, black |
WaferLoader |
OPM |
PI9500-xR120 |
|
SPU-005 |
0040-97187 |
Shoe Pick Up 200mm 3mm EDGE 30 degree Semitron |
WaferLoader |
Custom |
PI9500-xR120 |
|
SPU-006 |
0040-97186 |
Shoe Pick Up 150mm 3mm EDGE 30 degree PEEK |
WaferLoader |
OPM |
PI9500-xR120 |
|
SPU-007 |
n/a |
9500-XR120 Shoe Pick Up 150mm 3mm EDGE 55° PEEK |
WaferLoader |
Custom |
PI9500-xR120 |
|
WAS-001 |
0020-81151 |
Washer Lock |
WaferLoader |
OPM |
PI9500-xR120 |