Search Results

T-Match Refurbishment

High quality refurbishment for LAM T-match. Including parts 853-032294-001, 853-032294-002, 853-032294-003, 853-032294-004, 853-032294-400, 853-032294-603 Incoming inspection and cleaning is done by highly experienced engineers. Each match is then refurbished and thoroughly tested to meet specification including; Top plate conversion to reduce arcing Silver plate hardware is removed, cleaned, and inspected…

TCP 9600 Match Refurbishment

High quality refurbishment for LAM TCP RF match. Including parts 853-031685-001, 853-031685-002, 853-031685-003, 853-032190-006, 853-032190-008, 853-032190-306. Incoming inspection and cleaning is done by highly experienced engineers. Each match is then refurbished and thoroughly tested to meet specification including; Replace variable capacitors, HV fixed capacitor, bearings, limit switch Silver plate hardware…

Site de SSSco maintenant en langue française

Nouveau support pour les clients francophones de SSSco.

New service for DPS Poly Throttle Valve

DPS Poly Etch chambers, now SSSco offers a full refurbishment and repair service

DPS Poly Throttle Valve Rebuild 0010-39645

SSSco now rebuilds, tests and warranties assemble 0010-39645 DPS Poly Throttle Valve. This critical part has been in use in many cases for >10 years, and requires a periodic rebuild to ensure that particle performance and chamber reliability and maintained. Contact us for a quotation. SSSco use qualified parts and…

SSSco appoints new General Manager

Harry Engwer joins the management team at SSSco

RPS Upgrade for Producer 300mm and 200mm

The latest Paragon AX7700 RPS unit deliver 6 Liters of NF3

Paragon RPS Upgrade Kits

SSSco upgrades AMAT 200mm and 300mm CVD chambers with the latest Paragon NF3 RPS remote plasma systems. Paragon RPS units are installed on HDP Ultima 200mm and 300mm, and on Producer 200mm and 300mm chambers. This is an upgrade from Astron 2L or 3L models. Benefits include; •Better reliability and…

EPI and HTF Chambers, lamp module repair service

Customers using EPI chambers and HTF chambers such as poly, can have these repaired at SSSco to like-new condition

EPI Lamp Module Repair Service

Upper and Lower lamp modules are a critical part of the EPI chamber. After extensive use these can become damaged or cause unwelcome process shift, due to component damage or a wide range of patch repairs to cables, fixings or enclosures. SSSco has established a full repair service for both…

Thank You

Thank you for your request. We will reply within one business. For immediate help, please call us at +1-512-267-7087 and ask for customer service. SSS Co.

Thank You

Quote Request

Repair Request

Ultima+ Chamber upgrades

Ultima+ is a chamber for HDP-CVD, which was upgraded from the original Ultima version and added many new features including; The RF system is upgraded from ETO racks to new ENI Nova racks and generators for higher RF power and stability. The chamber ckean is upgraded from microwave to RPS…

Penulator monitor product range expanded for all Thermawave Optiprobe

The proven and globally adopted Penulator monitors for replacement machine control screens now reaches even more machine types

Improved decoders for SYSCON and ERROR LOG files. New release of SENTRY software

Latest upgrade to the SSSco PDS system - which upgrades AMAT equipment for remote automatic access and data management

Replace floppy drive U2 with PDS Drive

PDS Drive replaces AMAT Floppy Drive - adds significant new capabilty

AMAT XR Implanter, replacement control screen

Pro monitor replaces older, unreliable control screens on 9500 Xr and Xr series

Happy New Year and Best Wishes for 2017

Thanks for your support in 2016!